Sol-gel PZT for MEMS applications

Integrated Ferroelectrics

Volumn 42, Issue , 2002, Pages 25-37

  Piekarski, Brett ^a   Dubey, Madan ^a   Zakar, Eugene ^a   Polcawich, Ronald ^a   DeVoe, Don ^b   Wickenden, Dennis ^c  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

MEMS magnetometer; MEMS pressure sensors; MEMS pumps; MEMS resonators; PZT

Indexed keywords

MEMS MAGNETOMETER; MEMS PRESSURE SENSORS; MEMS PUMPS; MEMS RESONATORS;

ELECTROSTATICS; FILTERS (FOR FLUIDS); MAGNETOMETERS; MICROELECTROMECHANICAL DEVICES; SOL-GELS; THIN FILMS;

PIEZOELECTRIC MATERIALS;

EID: 33644775823     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580210868     Document Type: Article

References (12)

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