Improving bulk FinFET DC performance in comparison to SOI FinFET

Microelectronic Engineering

Volumn 86, Issue 10, 2009, Pages 2078-2085

  Poljak, Mirko ^a   Jovanović, Vladimir ^a   Suligoj, Tomislav ^a  

^a UNIVERSITY OF ZAGREB   (Croatia)

Author keywords

Body tied; Corner effect; Double gate MOSFET; FinFET; Short channel effect (SCE); Silicon on insulator (SOI)

Indexed keywords

BODY-TIED; CORNER EFFECT; DOUBLE-GATE MOSFET; FINFET; SHORT-CHANNEL-EFFECT (SCE); SILICON-ON-INSULATOR (SOI);

DRAIN CURRENT; FIELD EFFECT TRANSISTORS; LITHIUM BATTERIES; MICROSENSORS; MOSFET DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY; SILICON OXIDES;

SILICON WAFERS;

EID: 67649982800     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.01.066     Document Type: Article

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