SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 94, Issue 24, 2009, Pages

Room-temperature temperature sensitivity and resolution of doped-silicon microcantilevers

(3) Corbin, Elise A a Park, Keunhan b King, William P a

a University of Illinois at Urbana Champaign (United States)

b The University of Rhode Island (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; MICRO-CANTILEVER; NANO SCALE; PERIODIC HEATING; PERIODIC OPERATION; PRECISE MEASUREMENTS; RESISTIVE THERMOMETER; ROOM TEMPERATURE; SILICON MICROCANTILEVERS; TEMPERATURE CHANGES; TEMPERATURE COEFFICIENT OF RESISTANCE; TEMPERATURE RESOLUTION; TEMPERATURE SENSITIVITY; THERMAL MEASUREMENTS;

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS;

NANOCANTILEVERS;

EID: 67649207951 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3154567 Document Type: Article

Times cited : (10)

References (25)

1
- 0033301083
- 0084-6600,. 10.1146/annurev.matsci.29.1.505
- A. Majumdar, Annu. Rev. Mater. Sci. 0084-6600 29, 505 (1999). 10.1146/annurev.matsci.29.1.505
- (1999) Annu. Rev. Mater. Sci. , vol.29 , pp. 505
- Majumdar, A.¹

2
- 0034187332
- 1071-1023,. 10.1116/1.591381
- A. Hammiche, L. Bozec, M. Conroy, H. M. Pollock, G. Mills, J. M. R. Weaver, D. M. Price, M. Reading, D. J. Hourston, and M. Song, J. Vac. Sci. Technol. B 1071-1023 18, 1322 (2000). 10.1116/1.591381
- (2000) J. Vac. Sci. Technol. B , vol.18 , pp. 1322
- Hammiche, A.¹ Bozec, L.² Conroy, M.³ Pollock, H.M.⁴ Mills, G.⁵ Weaver, J.M.R.⁶ Price, D.M.⁷ Reading, M.⁸ Hourston, D.J.⁹ Song, M.¹⁰

3
- 33847648386
- 0034-6748,. 10.1063/1.2435589
- B. A. Nelson and W. P. King, Rev. Sci. Instrum. 0034-6748 78, 023702 (2007). 10.1063/1.2435589
- (2007) Rev. Sci. Instrum. , vol.78 , pp. 023702
- Nelson, B.A.¹ King, W.P.²

4
- 0037024745
- 0924-2031,. 10.1016/S0924-2031(01)00185-0
- M. Reading, D. Grandy, A. Hammiche, L. Bozec, and H. M. Pollock, Vib. Spectrosc. 0924-2031 29, 257 (2002). 10.1016/S0924-2031(01)00185-0
- (2002) Vib. Spectrosc. , vol.29 , pp. 257
- Reading, M.¹ Grandy, D.² Hammiche, A.³ Bozec, L.⁴ Pollock, H.M.⁵

5
- 17844404054
- A. Hammiche, L. Bozec, M. J. German, J. M. Chalmers, N. J. Everall, G. Poulter, M. Reading, D. B. Grandy, F. L. Martin, and H. M. Pollock, Spectroscopy 19, 20 (2004).
- (2004) Spectroscopy , vol.19 , pp. 20
- Hammiche, A.¹ Bozec, L.² German, M.J.³ Chalmers, J.M.⁴ Everall, N.J.⁵ Poulter, G.⁶ Reading, M.⁷ Grandy, D.B.⁸ Martin, F.L.⁹ Pollock, H.M.¹⁰

6
- 0031102074
- 1071-1023,. 10.1116/1.589319
- K. Luo, Z. Shi, J. Varesi, and A. Majumdar, J. Vac. Sci. Technol. B 1071-1023 15, 349 (1997). 10.1116/1.589319
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 349
- Luo, K.¹ Shi, Z.² Varesi, J.³ Majumdar, A.⁴

7
- 0035440479
- 1057-7157,. 10.1109/84.946785
- L. Shi, O. Kwon, A. C. Miner, and A. Majumdar, J. Microelectromech. Syst. 1057-7157 10, 370 (2001). 10.1109/84.946785
- (2001) J. Microelectromech. Syst. , vol.10 , pp. 370
- Shi, L.¹ Kwon, O.² Miner, A.C.³ Majumdar, A.⁴

8
- 0036471302
- 0957-4484,. 10.1088/0957-4484/13/1/306
- D. W. Lee, T. Ono, and M. Esashi, Nanotechnology 0957-4484 13, 29 (2002). 10.1088/0957-4484/13/1/306
- (2002) Nanotechnology , vol.13 , pp. 29
- Lee, D.W.¹ Ono, T.² Esashi, M.³

9
- 0032023865
- 1057-7157,. 10.1109/84.661386
- B. W. Chui, T. D. Stowe, Y. S. Ju, K. E. Goodson, T. W. Kenny, H. J. Mamin, B. D. Terris, and R. P. Ried, J. Microelectromech. Syst. 1057-7157 7, 69 (1998). 10.1109/84.661386
- (1998) J. Microelectromech. Syst. , vol.7 , pp. 69
- Chui, B.W.¹ Stowe, T.D.² Ju, Y.S.³ Goodson, K.E.⁴ Kenny, T.W.⁵ Mamin, H.J.⁶ Terris, B.D.⁷ Ried, R.P.⁸

10
- 33845548747
- 1057-7157,. 10.1109/JMEMS.2006.886020
- J. Lee, T. Beechem, T. L. Wright, B. A. Nelson, S. Graham, W. P. King, J. Microelectromech. Syst. 1057-7157 15, 1644 (2006). 10.1109/JMEMS.2006.886020
- (2006) J. Microelectromech. Syst. , vol.15 , pp. 1644
- Lee, J.¹ Beechem, T.² Wright, T.L.³ Nelson, B.A.⁴ Graham, S.⁵ King, W.P.⁶

11
- 65449163479
- 0957-4484,. 10.1088/0957-4484/20/9/095301
- Z. Dai, W. P. King, and K. Park, Nanotechnology 0957-4484 20, 095301 (2009). 10.1088/0957-4484/20/9/095301
- (2009) Nanotechnology , vol.20 , pp. 095301
- Dai, Z.¹ King, W.P.² Park, K.³

12
- 56449098503
- 0022-1481,. 10.1115/1.2953238
- K. Park, G. L. W. Cross, Z. M. Zhang, and W. P. King, ASME J. Heat Transfer 0022-1481 130, 102401 (2008). 10.1115/1.2953238
- (2008) ASME J. Heat Transfer , vol.130 , pp. 102401
- Park, K.¹ Cross, G.L.W.² Zhang, Z.M.³ King, W.P.⁴

13
- 34548499127
- 0924-4247,. 10.1016/j.sna.2007.06.008
- B. A. Nelson and W. P. King, Sens. Actuators, A 0924-4247 140, 51 (2007). 10.1016/j.sna.2007.06.008
- (2007) Sens. Actuators, A , vol.140 , pp. 51
- Nelson, B.A.¹ King, W.P.²

14
- 0036904734
- 1057-7157,. 10.1109/JMEMS.2002.803283
- W. P. King, T. W. Kenny, K. E. Goodson, G. L. W. Cross, M. Despont, U. T. Dürig, H. Rothuizen, G. Binnig, and P. Vettiger, J. Microelectromech. Syst. 1057-7157 11, 765 (2002). 10.1109/JMEMS.2002.803283
- (2002) J. Microelectromech. Syst. , vol.11 , pp. 765
- King, W.P.¹ Kenny, T.W.² Goodson, K.E.³ Cross, G.L.W.⁴ Despont, M.⁵ Dürig, U.T.⁶ Rothuizen, H.⁷ Binnig, G.⁸ Vettiger, P.⁹

15
- 31144434669
- 0003-6951,. 10.1063/1.2164394
- B. A. Nelson, W. P. King, A. R. Laracuente, P. E. Sheehan, and L. J. Whitman, Appl. Phys. Lett. 0003-6951 88, 033104 (2006). 10.1063/1.2164394
- (2006) Appl. Phys. Lett. , vol.88 , pp. 033104
- Nelson, B.A.¹ King, W.P.² Laracuente, A.R.³ Sheehan, P.E.⁴ Whitman, L.J.⁵

16
- 34248231173
- 1530-6984,. 10.1021/nl070300f
- R. Szoszkiewicz, T. Okada, S. C. Jones, T. D. Li, W. P. King, S. R. Marder, and E. Riedo, Nano Lett. 1530-6984 7, 1064 (2007). 10.1021/nl070300f
- (2007) Nano Lett. , vol.7 , pp. 1064
- Szoszkiewicz, R.¹ Okada, T.² Jones, S.C.³ Li, T.D.⁴ King, W.P.⁵ Marder, S.R.⁶ Riedo, E.⁷

17
- 42949090392
- 0003-2700,. 10.1021/ac702423c
- K. Park, J. Lee, R. Bhargava, and W. P. King, Anal. Chem. 0003-2700 80, 3221 (2008). 10.1021/ac702423c
- (2008) Anal. Chem. , vol.80 , pp. 3221
- Park, K.¹ Lee, J.² Bhargava, R.³ King, W.P.⁴

18
- 65249104427
- 10.1021/nl803024p
- J. Lee, A. Liao, E. Pop, and W. P. King, Nano Lett. 9, 1356 (2009). 10.1021/nl803024p
- (2009) Nano Lett. , vol.9 , pp. 1356
- Lee, J.¹ Liao, A.² Pop, E.³ King, W.P.⁴

19
- 33846272764
- 0021-8979,. 10.1063/1.2403862
- J. Lee, T. L. Wright, M. R. Abel, E. O. Sunden, A. Marchenkov, S. Graham, and W. P. King, J. Appl. Phys. 0021-8979 101, 014906 (2007). 10.1063/1.2403862
- (2007) J. Appl. Phys. , vol.101 , pp. 014906
- Lee, J.¹ Wright, T.L.² Abel, M.R.³ Sunden, E.O.⁴ Marchenkov, A.⁵ Graham, S.⁶ King, W.P.⁷

20
- 34248590796
- 0021-8979,. 10.1063/1.2720263
- K. Park, A. Marchenkov, Z. M. Zhang, and W. P. King, J. Appl. Phys. 0021-8979 101, 094504 (2007). 10.1063/1.2720263
- (2007) J. Appl. Phys. , vol.101 , pp. 094504
- Park, K.¹ Marchenkov, A.² Zhang, Z.M.³ King, W.P.⁴

21
- 54949121393
- 1530-437X,. 10.1109/JSEN.2008.2005159
- J. Lee and W. P. King, IEEE Sens. J. 1530-437X 8, 1805 (2008). 10.1109/JSEN.2008.2005159
- (2008) IEEE Sens. J. , vol.8 , pp. 1805
- Lee, J.¹ King, W.P.²

22
- 29744438825
- 0034-6748,. 10.1063/1.2130718
- C. Dames and G. Chen, Rev. Sci. Instrum. 0034-6748 76, 124902 (2005). 10.1063/1.2130718
- (2005) Rev. Sci. Instrum. , vol.76 , pp. 124902
- Dames, C.¹ Chen, G.²

23
- 34147123195
- 1057-7157,. 10.1109/JMEMS.2006.889498
- K. Park, J. Lee, Z. M. Zhang, and W. P. King, J. Microelectromech. Syst. 1057-7157 16, 213 (2007). 10.1109/JMEMS.2006.889498
- (2007) J. Microelectromech. Syst. , vol.16 , pp. 213
- Park, K.¹ Lee, J.² Zhang, Z.M.³ King, W.P.⁴

24
- 4944233707
- 0021-8979,. 10.1063/1.1779972
- G. De Marzi, D. Iacopino, A. J. Quinn, and G. Redmond, J. Appl. Phys. 0021-8979 96, 3458 (2004). 10.1063/1.1779972
- (2004) J. Appl. Phys. , vol.96 , pp. 3458
- De Marzi, G.¹ Iacopino, D.² Quinn, A.J.³ Redmond, G.⁴

25
- 33747326193
- 0953-8984,. 10.1088/0953-8984/18/34/007
- Q. G. Zhang, B. Y. Cao, X. Zhang, M. Fujii, and K. Takahashi, J. Phys.: Condens. Matter 0953-8984 18, 7937 (2006). 10.1088/0953-8984/18/34/007
- (2006) J. Phys.: Condens. Matter , vol.18 , pp. 7937
- Zhang, Q.G.¹ Cao, B.Y.² Zhang, X.³ Fujii, M.⁴ Takahashi, K.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.