Liquid operation of silicon microcantilever heaters

IEEE Sensors Journal

Volumn 8, Issue 11, 2008, Pages 1805-1806

  Lee, Jungchul ^a   King, William P ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Laser Raman thermometry; Liquid operation; Microcantilever; Microcantilever heater; Resistive thermometer

Indexed keywords

ATOMIC SPECTROSCOPY; CALIBRATION; CHEMICAL SENSORS; FORMING; SILICON; TEMPERATURE SENSORS; THERMOMECHANICAL TREATMENT; THERMOMETERS;

LASER RAMAN THERMOMETRY; LIQUID OPERATION; MICROCANTILEVER; MICROCANTILEVER HEATER; RESISTIVE THERMOMETER;

COMPOSITE MICROMECHANICS;

EID: 54949121393     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2008.2005159     Document Type: Article

References (6)

1. J. Lee, T. Beechem, T. L. Wright, B. A. Nelson, S. Graham, and W. P. King, "Electrical, thermal, and mechanical characterization of silicon microcantilever heaters," J. Microelectromech. Syst., vol. 15, pp. 1644-1655, Dec. 2006.
2. A. S. Basu and Y. B. Gianchandani, "Shaping high-speed Marangoni flow in liquid films by microscale perturbations in surface temperature," Appl. Phys. Lett., vol. 90, p. 034102, Jan. 2007.
3. J. Lee and W. P. King, "Phase change and cooling characteristics of microjets measured using microcantilever heaters," Sens. Actuators A, vol. 147, pp. 64-69, 2008.
4. J. Lee and W. P. King, "Microcantilever hotplates: Design, fabrication, and characterization," Sen. Actuators A, vol. 136, pp. 291-298, May 2007.
5. J. Lee, F. Goericke, and W. P. King, "Temperature-dependent thermomechanical noise spectra of dopoed silicon microcantilevers," Sens. Actuators A, vol. 145-146, pp. 37-43, 2007.
6. K. Park, J. Lee, Z. M. Zhang, and W. P. King, "Frequency-dependant electrical and thermal response of heated atomic force microscope cantilevers," J. Microelectromech. Syst., vol. 16, pp. 213-222, 2007.