Single impact crater functions for ion bombardment of silicon

Applied Physics Letters

Volumn 92, Issue 13, 2008, Pages

  Kalyanasundaram, N ^a   Ghazisaeidi, M ^a   Freund, J B ^a   Johnson, H T ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASYMPTOTIC STABILITY; ION BOMBARDMENT; MONTE CARLO METHODS; REACTION KINETICS; SURFACE PHENOMENA;

KINETIC MONTE CARLO CALCULATIONS; MASS REARRANGEMENTS; SINGLE IMPACT CRATER FUNCTIONS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 41649121860     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2905297     Document Type: Article

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