Effect of 2-mercapto-5-benzimidazolesulfonic acid in superconformal cu electroless deposition

Journal of the Electrochemical Society

Volumn 156, Issue 6, 2009, Pages

  Lee, Chang Hwa ^a,b   Kim, Ae Rim ^a   Koo, Hyo Chol ^a   Kim, Jae Jeong ^a  

^a Seoul National University   (South Korea)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

2-MERCAPTO-5-BENZIMIDAZOLESULFONIC ACIDS; ACCELERATION EFFECTS; ANODIC REACTIONS; CATHODIC REACTIONS; CONCENTRATION DEPENDENTS; CU ELECTROLESS DEPOSITIONS; ETHYLENE DIAMINE TETRA ACETIC ACIDS; HALF-CELL REACTIONS; HIGH CONCENTRATIONS; LOW CONCENTRATIONS; PLANAR SUBSTRATES; POLY(ETHYLENE GLYCOL); SHAPE EVOLUTIONS;

ACIDS; ANODIC OXIDATION; ETHYLENE; ETHYLENE GLYCOL; POLYETHYLENE GLYCOLS; POLYETHYLENE OXIDES; SURFACE ROUGHNESS;

METAL ANALYSIS;

EID: 65449124205     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3117343     Document Type: Article

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