Quantification of surface-sensitive electron spectroscopies

Surface Science

Volumn 603, Issue 10-12, 2009, Pages 1342-1352

  Jablonski, A ^a  

^a INSTITUTE OF PHYSICAL CHEMISTRY   (Poland)

Author keywords

Auger electron spectroscopy; Elastic and inelastic electron scattering; Quantitative analysis; Theory of electron transport; X ray photoelectron spectroscopy

Indexed keywords

ELASTIC AND INELASTIC ELECTRON SCATTERING; ELECTRON TRAJECTORIES; EXPERIMENTAL PROCEDURES; PHYSICAL PARAMETERS; QUANTIFICATION OF AES AND XPS; QUANTITATIVE ANALYSIS; SCATTERING CROSS SECTIONS; SIGNAL ELECTRONS; SURFACE COMPOSITIONS; SURFACE SCIENCE; THEORY OF ELECTRON TRANSPORT; XPS;

AUGERS; CHEMICAL ANALYSIS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON PROBE MICROANALYSIS; ELECTRON SCATTERING; ELECTRON TRANSITIONS; ELECTRON TRANSPORT PROPERTIES; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; SPECTROSCOPY; SPECTRUM ANALYSIS; SURFACE ANALYSIS; SURFACES; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

AUGER ELECTRON SPECTROSCOPY;

EID: 65149104672     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2008.08.035     Document Type: Article

References (136)

1. In: Briggs D., and Seah M.P. (Eds). Practical Surface Analysis: Auger and X-ray Photoelectron Spectroscopy. second ed. vol. 1 (1990), Wiley, Chichester 1
2. Haas T.W., Dooley III G.J., Grant J.T., Jackson A.G., and Hooker M.P. Prog. Surface Sci. 1 (1971) 155
3. Chang C.C. In: Kane P.F., and Larrabee G.B. (Eds). Characterization of Solid Surfaces (1974), Plenum Press, New York, NY 509
4. Reniers F., and Tewell C. J. Electron Spectrosc. Relat. Phenom. 142 (2005) 1
5. Powell C.J. J. Vac. Technol. A21 (2003) S42
6. Harris L.A. J. Appl. Phys. 39 (1968) 1419
7. Harris L.A. J. Appl. Phys. 39 (1968) 1428
8. Harris L.A. J. Vac. Sci. Technol. 11 (1974) 23
9. Bishop H.E., and Riviere J.C. J. Appl. Phys. 40 (1969) 1740
10. Palmberg P.W. Anal. Chem. 45 (1973) 549A
11. Ertl G., and Küppers J. Low Energy Electrons and Surface Chemistry (1974), Verlag Chemie, Weiheim (Chapter 2)
12. In: Czanderna A.W. (Ed). Methods of Surface Analysis vol. 1 (1971), Elsevier, Amsterdam
13. Fadley C.S., Baird R.J., Siekhaus W., Novakov T., and Bergstrom S.A.L. J. Electron Spectrosc. Relat. Phenom. 4 (1974) 93
14. Ebel M.F. Surface Interface Anal. 1 (1979) 58
15. Jablonski A., and Powell C.J. Surface Interface Anal. 20 (1993) 771
16. Jablonski A. Polish J. Chem. 74 (2000) 1533
17. Werner W.S.M. Surface Interface Anal. 31 (2001) 141
18. Tilinin I.S., Jablonski A., and Werner W.S.M. Prog. Surface Sci. 52 (1996) 193
19. In: Briggs D., and Grant J.T. (Eds). Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (2003), IM Publishers, Chichester
20. Barthes-Labrousse M.-G. Surface Interface Anal. 26 (1998) 72
21. Kover L. Surface Interface Anal. 29 (2000) 671
22. Castle J.E., and Powell C.J. Surface Interface Anal. 36 (2004) 225
23. Kover L., and Powell C.J. Surface Interface Anal. 38 (2006) 88
24. .
25. Yoshihara K., Shimizu R., Homma T., Tokutaka H., Goto K., Uemura M., Fujita D., Kurokawa A., Ichimura S., Oshima C., Kurahashi M., Kudo M., Hashiguchi Y., Fukuda Y., Suzuki T., Ohmura T., Soeda F., Tanaka K., Sekine T., Shiokawa Y., and Hayashi T. Surface Interface Anal. 12 (1988) 125
26. Yoshihara K., Shimizu R., Homma T., Tokutaka H., Goto K., Fujita D., Kurokawa A., Ichimura S., Kurahashi M., Kudo M., Hashiguchi Y., Suzuki T., Ohmura T., Soeda F., Tanaka K., Tanaka A., Shiokawa Y., and Hayashi T. Surface Interface Anal. 16 (1990) 140
27. Yoshitake M., Yoshihara K., and and other members of the VAMAS-SCA working group in Japan. Surface Interface Anal. 17 (1991) 711
28. R. Shimizu, S. Ichimura, Quantitative Analysis by Auger Electron Spectroscopy, Report No. I-006, 76-0175, Toyota Foundation, Tokyo, 1981.
29. Ichimura S., and Shimizu R. Surface Sci. 112 (1981) 386
30. Jablonski A. Surface Interface Anal. 4 (1982) 135
31. Hall P.M., and Morabito J.M. Surface Sci. 83 (1979) 391
32. Moulder J.F., Stickle W.F., Sobol P.E., and Bomben K.D. Handbook of X-ray Photoelectron Spectroscopy (1992), Perkin Elmer Corporation, Eden Prairie, Minnesota
33. Seah M.P. J. Electron Spectrosc. Relat. Phenom. 100 (1999) 55
34. Baschenko O.A., and Nefedov V.I. J. Electron Spectrosc. Relat. Phenom. 17 (1979) 420
35. Baschenko O.A., and Nefedov V.I. J. Electron Spectrosc. Relat. Phenom. 21 (1980) 153
36. Baschenko O.A., and Nefedov V.I. J. Electron Spectrosc. Relat. Phenom. 27 (1982) 109
37. Jablonski A. Surface Sci. 188 (1987) 164
38. Tilinin I.S., and Werner W.S.M. Phys. Rev. B46 (1992) 13739
39. Jablonski A. Surface Sci. 364 (1996) 380
40. Chandrasekhar S. Radiative Transfer (1960), Dover Publications, New York (Chapter 5)
41. Jablonski A., and Zemek J. Phys. Rev. B48 (1993) 4799
42. Jablonski A., and Powell C.J. Phys. Rev. B50 (1994) 4739
43. Nefedov V.I. J. Electron Spectrosc. Relat. Phenom. 100 (1999) 1
44. Jablonski A. Surface Interface Anal. 23 (1995) 29
45. Jablonski A., and Tilinin I.S. J. Electron Spectrosc. Relat. Phenom. 74 (1995) 207
46. C.J. Powell, A. Jablonski, NIST Electron Effective-Attenuation-Length Database Version 1.1, Standard Reference Data Program Database 82, US Department of Commerce, National Institute of Standards and Technology, Gaithersburg, Maryland, 2003. .
47. Surface Chemical Analysis - Vocabulary, ISO 18115, International Organisation for Standardisation, Geneva, 2001.
48. Standard Terminology Relating to Surface Analysis, ASTM E673-03, Annual Book of ASTM Standards 2006, vol. 3.06, ASTM International, West Conshohocken, 2006, p. 647.
49. Powell C.J., and Jablonski A. J. Phys. Chem. Ref. Data 28 (1999) 19
50. Tanuma S., Powell C.J., and Penn D.R. Surface Interface Anal. 17 (1991) 911
51. Tanuma S., Powell C.J., and Penn D.R. Surface Interface Anal. 17 (1991) 927
52. Tanuma S., Powell C.J., and Penn D.R. Surface Interface Anal. 21 (1994) 165
53. Tanuma S., Powell C.J., and Penn D.R. Surface Interface Anal. 37 (2005) 1
54. Jablonski A. Surface Sci. 151 (1985) 166
55. Jablonski A. Surface Interface Anal. 37 (2005) 1035
56. Ashley J.C. J. Electron Spectrosc. Relat. Phenom. 50 (1990) 323
57. Kwei C.M., Chen Y.F., Tung C.J., and Wang J.P. Surface Sci. 293 (1993) 202
58. Ding Z.-J., and Shimizu R. Scanning 18 (1996) 92
59. Dolinski W., Mroz S., Palczynski J., Gruzza B., Bondot P., and Porte A. Acta Phys. Polon. A81 (1992) 193
60. Lesiak B., Jablonski A., and Gergely G. Vacuum 40 (1990) 67
61. A. Koch, Ph.D. Thesis, Physics Department, Eberhard-Karls-Universität, Tübingen, Germany, 1996.
62. Beilschmidt H., Tilinin I.S., and Werner W.S.M. Surface Interface Anal. 22 (1994) 120
63. C.J. Powell, A. Jablonski, NIST Electron Inelastic-Mean-Free-Path Database, Version 1.1, Standard Reference Data Program Database 71, US Department of Commerce, National Institute of Standards and Technology, Gaithersburg, MD (2000). .
64. Elastic Scattering of Electrons and Positrons, ICRU Report 77, Journal of ICRU, vol. 7, Oxford University Press, Oxford, 2007. .
65. Jablonski A., Salvat F., and Powell C.J. J. Phys. Chem. Ref. Data 33 (2004) 409
66. Jablonski A. Phys. Rev. B43 (1991) 7546
67. Jablonski A., Gryko J., Kraaer J., and Tougaard S. Phys. Rev. B39 (1989) 61
68. Ichimura S., Aratama M., and Shimizu R. J. Appl. Phys. 51 (1980) 2853
69. Panajotovic R., Filipovic D., Marinkovic B., Pejcev V., Kurepa M., and Vuskovic L. J. Phys. B: At. Mol. Opt. Phys. 30 (1997) 5877
70. Dubois R.D., and Rudd M.E. J. Phys. B: At. Mol. Phys. 9 (1976) 2657
71. Cvejanovic D., and Crowe A. J. Phys. B: At. Mol. Opt. Phys. 30 (1997) 2873
72. Gupta S.C., and Rees J.A. J. Phys. B: At. Mol. Phys. 8 (1975) 1267
73. Jansen R.H.J., de Heer F.J., Luyken H.J., van Wingerden B., and Blaauw H.J. J. Phys. B: At. Mol. Phys. 9 (1976) 185
74. Srivastava S.K., Tanaka H., Chutjian A., and Trajmar S. Phys. Rev. A23 (1981) 2156
75. Vuskovic L., and Kurepa M.V. J. Phys. B: At. Mol. Phys. 9 (1976) 837
76. Williams J.F., and Willis B.A. J. Phys. B: At. Mol. Phys. 8 (1975) 1670
77. Wagenaar R.W., de Boer A., van Tubergen T., Los J., and de Heer F.J. J. Phys. B: At. Mol. Phys. 19 (1986) 3121
78. Ester T., Kessler J., and Phys J. J. Phys. B: At. Mol. Opt. Phys. 27 (1994) 4295
79. Jansen R.H.J., and de Heer F.J. J. Phys. B: At. Mol. Phys. 9 (1976) 213
80. Nishimura H., Matsuda T., and Danjo A. J. Phys. Soc. Jpn. 56 (1987) 70
81. Salvat F., Jablonski A., and Powell C.J. Comput. Phys. Commun. 165 (2005) 157
82. Salvat F. Phys. Rev. A68 (2003) 012708
83. Jablonski A., Salvat F., and Powell C.J. Surface Interface Anal. 37 (2005) 1115
84. A. Jablonski, F. Salvat, C.J. Powell, NIST Electron Elastic-Scattering Cross-Section Database, Version 3.1, Standard Reference Data Program Database 64, US Department of Commerce, National Institute of Standards and Technology, Gaithersburg, MD, 2003. .
85. Riley M.E., MacCallum C.J., and Biggs F. At. Data Nucl. Data Tables 15 (1975) 443
86. Mayol R., and Salvat F. At. Data Nucl. Data Tables 65 (1977) 55
87. Tilinin I.S. Phys. Rev. A51 (1995) 3058
88. Jablonski A. Phys. Rev. B58 (1998) 16470
89. Jablonski A., and Powell C.J. Phys. Rev. B76 (2007) 085123
90. Bethe H.A. Ann. Phys. (Leipzig) 5 (1930) 325
91. Bethe H.A. Handbook of Physics vol. 24 (1933), Springer, Berlin
92. Bethe H.A., and Ashkin J. Experimental Nuclear Physics (1953), Wiley, New York
93. Rao-Sahib T.S., and Wittry D.B. J. Appl. Phys. 45 (1974) 5060
94. Stopping Powers for Electrons and Positrons, ICRU Report 37, International Commission on Radiation Units and Measurements, Bethesda, MD, 1984.
95. M.J. Berger, J.S. Coursey, M.A. Zucker, Stopping-Power and Range Tables for Electrons, Positrons and Helium Ions, NIST Physical Reference Data. .
96. Tanuma S., Powell C.J., and Penn D.R. Surface Interface Anal. 37 (2005) 978
97. Tanuma S., Powell C.J., and Penn D.R. J. Appl. Phys. 103 (2008) 063707
98. D.C. Joy, A Database of Electron-Solid Interactions, E.M. Facility, University of Tennessee, Knoxville, 2008. .
99. Jablonski A., Tanuma S., and Powell C.J. Surface Interface Anal. 38 (2006) 76
100. Jablonski A., Tanuma S., and Powell C.J. J. Appl. Phys. 103 (2008) 063708
101. Luo S., Zhang X., and Joy D.C. Rad. Eff. Def. Solid 117 (1991) 235
102. Al-Ahmad K.O., and Watt D.E. J. Phys. D: Appl. Phys. 16 (1983) 2257
103. Joy D.C., Luo S., Gauvin R., Hovington P., and Evans N. Scanning Microsc. 10 (1996) 653
104. Liu M., An Z., Tang C., Liu Z., Peng X., and Long X. At. Data Nucl. Data Tables 76 (2000) 213
105. Seah M.P., and Gilmore I.S. Surface Interface Anal. 26 (1998) 815
106. Gryzinski M. Phys. Rev. 138 (1965) A336
107. Casnati E., Tartari A., and Baraldi C. J. Phys. B: At. Mol. Phys. 15 (1982) 155
108. Bote D., and Salvat F. Phys. Rev. A77 (2008) 042701
109. Hanke W., Ebel H., Ebel M.F., Jablonski A., and Hirokawa K. J. Electron Spectrosc. Relat. Phenom. 40 (1986) 241
110. Jablonski A., Lesiak B., Zommer L., Ebel M.F., Ebel H., Fukuda Y., Suzuki Y., and Tougaard S. Surface Interface Anal. 21 (1994) 724
111. Reilman R.F., Msezane A., and Manson S. J. Electron Spectrosc. Relat. Phenom. 8 (1976) 389
112. Band I.M., Kharitonov Yu.I., and Trzaskovskaya M.B. At. Data Nucl. Data Tables 23 (1979) 443
113. Yeh J.J., and Lindau I. At. Data Nucl. Data Tables 32 (1985) 1
114. Yeh J.J. Atomic Calculation of Photoionization Cross-Sections and Asymmetry Parameters (1993), Gordon and Breach Science Publishers, Langhorne, Pennsylvania
115. Trzhaskovskaya M.B., Nefedov V.I., and Yarzemsky V.G. At. Data Nucl. Data Tables 77 (2001) 97
116. Trzhaskovskaya M.B., Nefedov V.I., and Yarzemsky V.G. At. Data Nucl. Data Tables 82 (2002) 257
117. Seah M.P., Gilmore I.S., and Spencer S.J. Surface Interface Anal. 31 (2001) 778
118. Chen Y.F. Surface Sci. 345 (1996) 213
119. Chen Y.F. Surface Sci. 380 (1997) 199
120. Werner W.S.M., Smekal W., Tomastik C., and Stori H. Surface Sci. 486 (2002) L461
121. Chen Y.F. Surface Sci. 519 (2002) 115
122. Jablonski A., and Zemek J. Surface Sci. 601 (2007) 3409
123. Salma K., Ding Z.J., Li H.M., and Zhang Z.M. Surface Sci. 600 (2006) 1526
124. Tanuma S., Ichimura S., and Goto K. J. Surf. Anal. 5 (1999) 48
125. Tanuma S., Ichimura S., and Goto K. Surface Interface Anal. 30 (2000) 212
126. Jablonski A., Zemek J., and Jiricek P. Appl. Surface Sci. 252 (2005) 905
127. Jablonski A. Surface Sci. 499 (2002) 219
128. Jablonski A., and Powell C.J. Surface Sci. 574 (2005) 219
129. Deng Z.J., Tan W.S., and Li Y.G. J. Appl. Phys. 99 (2006) 084903
130. Jablonski A., and Powell C.J. Surface Sci. 601 (2007) 965
131. Ichimura S., Shimizu R., and Langeron J.P. Surface Sci. 124 (1983) L49
132. Shimizu R. Jpn. J. Appl. Phys. 22 (1983) 1631
133. Jablonski A., and Powell C.J. Surface Sci. Rep. 47 (2002) 33
134. Jablonski A., Tilinin I.S., and Powell C.J. Phys. Rev. B54 (1996) 10927
135. Jablonski A., and Powell C.J. J. Vac. Sci. Technol. A21 (2003) 274
136. W.S.M. Werner, W. Smekal, C.J. Powell, NIST Database for the Simulation of Electron Spectra for Surface Analysis, Version 1.1, Standard Reference Data Program Database 100, US Department of Commerce, National Institute of Standards and Technology, Gaithersburg, MD, 2005. .