Ultra-small site temperature sensing by carbon nanotube thermal probes

2004 4th IEEE Conference on Nanotechnology

Volumn , Issue , 2004, Pages 146-148

  Arai, Fumihito ^a   Ng, Chinaik ^a   Liu, Pou ^a   Dong, Lixin ^a   Imaizumi, Yoshiaki ^a   Maeda, Kazutoshi ^a   Maruyama, Hisataka ^a   Ichikawa, Akihiko ^a   Fukuda, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Carbon nanotube; Electron beam induced deposition; Nanodevices; Nanoheater; Temperature coefficient of resistance; Thermal probes; Ultra small site

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; CAPACITORS; CHEMICAL VAPOR DEPOSITION; ELECTROCHEMISTRY; ELECTRODES; ELECTRON BEAMS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; SEMICONDUCTOR GROWTH;

ELECTRON-BEAM-INDUCED DEPOSITION; NANOHEATERS; TEMPERATURE COEFFICIENTS OF RESISTANCE; THERMAL PROBES; ULTRASMALL SITE;

CARBON NANOTUBES;

EID: 20344386761     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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