Fabrication of FIB-CVD Nanotemperature Sensor Probe for Local Temperature Sensing in Water Environments

Journal of Robotics and Mechatronics

Volumn 19, Issue 5, 2007, Pages 512-518

  Elshimy, Haitham ^a   Nakajima, Masahiro ^a   Imaizumi, Yoshiaki ^a   Arai, Fumihito ^b   Fukuda, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

chemical vapor deposition; focused ion beam; local temperature; nano sensor probe; water environment

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; FOCUSED ION BEAMS; NANOSENSORS; PROBES; SCANNING ELECTRON MICROSCOPY; TEMPERATURE DISTRIBUTION; TEMPERATURE SENSORS;

ATOMIC FORCE MICROSCOPE CANTILEVERS; CHEMICAL VAPOUR DEPOSITION; FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION; FOCUSED IONS BEAMS; LOCAL TEMPERATURE; NANO-SENSOR PROBE; SENSING TEMPERATURE; SENSOR PROBES; TEMPERATURE SENSING; WATER ENVIRONMENTS;

FABRICATION;

EID: 55349145582     PISSN: 09153942     EISSN: 18838049     Source Type: Journal    
DOI: 10.20965/jrm.2007.p0512     Document Type: Article

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