Temperature dependence of quality factor in MEMS resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 590-593

  Kim, Bongsang ^a   Jha, Chandra Mohan ^a   White, Taylor ^b   Candler, Rob Norris ^a   Hopcroft, Matthew ^a   Agarwal, Manu ^a   Park, Kwan Kyu ^a   Melamud, Renata ^a   Chandorkar, Saurabh ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

^b CALIFORNIA POLYTECHNIC STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELASTICITY; ENERGY DISSIPATION; MICROELECTROMECHANICAL DEVICES; TEMPERATURE CONTROL; THERMOELASTICITY;

ELASTIC DISSIPATION; QUALITY FACTOR; TEMPERATURE DEPENDENCE;

RESONATORS;

EID: 33750110787     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. W.-T. Park, et al, "Wafer Scale Encapsulation of MEMS Devices," INTERPACK'03 The Pacific RIM/ASME, Maui, Hawaii, USA, 2003.
2. C. Nguyen, "High-Q micromechanical oscillators and filters for communications," IEEE ISCAS' 97. Circuits and Systems in the Information Age, Hong Kong, 1997.
3. W. E. Newell, "Miniaturization of Tuning Forks," Science, pp. 1320-1326, 1968.
4. R. N. Candler, et al, "Impact of Geometry on Thermoelastic Dissipation in Micromechanical Resonant Beams," Journal of MEMS, in review, 2005.
5. R. N. Candler et al, "Investigation of energy loss mechanisms in micromechanical resonators," presented at IEEE Int'l SolidState Sensors and Actuators Conference, Boston, USA, 2003.
6. Z. Hao and F. Ayazi, "Support Loss In Micromechanical Disk Resonators," presented at MEMS 2005. 18th IEEE International Conference on MEMS, Miami, FL, USA, 2005.
7. B. Kim, et al, "Investigation of MEMS resonator characteristics during long-term and wide temperature operation," presented at 2004 ASME Int'l Mechanical Eng. Congress and RD&D Expo, Anaheim, CA, USA, 2004.
8. R. N. Candler et al, "Long-Term and Accelerated Life Testing of a Novel Single-Wafer Vacuum Encapsulation of MEMS Resonators," Journal of MEMS, in review, 2005.