Direct optical measurement of the Q values of RF-MEMS resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn 4, Issue , 2005, Pages 2112-2115

  Holmgren, Olli ^a   Kokkonen, Kimmo ^a   Kaajakari, Ville ^b   Oja, Aarne ^b   Knuuttila, Jouni V ^a  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

FUNCTION EVALUATION; INTERFEROMETERS; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; SCANNING; VACUUM;

MICHELSON LASER INTERFEROMETERS; OPTICAL MEASUREMENT;

RESONATORS;

EID: 33847159892     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603298     Document Type: Conference Paper

References (4)

1. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Square-extensional mode single-crystal silicon micromechanical resonator for low phase noise oscillator applications," Electron Dev. Lett., vol. 25, no. 4, pp. 173-175, 2004.
2. J. V. Knuuttila, P. T. Tikka, and M. M. Salomaa, "Scanning Michelson interferometer for imaging surface acoustic wave fields," Opt. Lett., vol. 25, pp. 613-615, May 2000.
3. O. Holmgren, K. Kokkonen, T. Mattila, V. Kaajakari, A. Oja, J. Kiihamäki, J. V. Knuuttila, and M. M. Salomaa, "Imaging of in- and out-of-plane vibrations in micromechanical resonator," Electron. Lett., vol. 41, pp. 16-17, 2005.
4. _, "Visualization of in- and out-of-plane vibrations in a micromechanical RF-resonator," in Proc. IEEE Ultrason. Symp., 2004, pp. 1359-1362.