A mode-matched silicon-yaw tuning-fork gyroscope with subdegree-per-hour Allan deviation bias instability

Journal of Microelectromechanical Systems

Volumn 17, Issue 6, 2008, Pages 1526-1536

  Zaman, Mohammad Faisal ^a,b   Sharma, Ajit ^c   Hao, Zhili ^d   Ayazi, Farrokh ^a,b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Qualtré Inc   (United States)

^c TEXAS INSTRUMENTS   (United States)

^d Old Dominion University ^*  (United States)

Author keywords

Mode matching; Silicon on insulator (SOI); Tuning fork; Vibratory microgyroscope

Indexed keywords

AMPLIFICATION; FLOORS; GYROSCOPES; MICROSENSORS; NONMETALS; SILICON; TUNING;

ALLAN DEVIATIONS; ANGULAR RATES; BIAS INSTABILITIES; BIAS STABILITIES; BROWNIAN NOISES; EXPERIMENTAL DATUMS; FLEXURAL MODES; FREQUENCY SPLITS; IN VACUUMS; MECHANICAL AMPLIFICATIONS; MODE-MATCHING; NOISE FLOORS; Q FACTORS; RATE SENSITIVITIES; SENSE MODES; SILICON ETCHINGS; SILICON ON INSULATORS; SILICON-ON-INSULATOR (SOI); SINGLE CRYSTALLINE SILICONS; TUNING FORK; VIBRATORY MICROGYROSCOPE;

MICROCRYSTALLINE SILICON;

EID: 57449102069     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.2004794     Document Type: Article

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