Proton beam writing of microstructures at the ion nanoprobe LIPSION

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 250, Issue 1-2 SPEC. ISS., 2006, Pages 66-70

  Menzel, F ^a   Spemann, D ^a   Petriconi, S ^a   Lenzner, J ^a   Butz, T ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

Ion nanoprobe; Microstructures; Ni plating; Photoresist; Proton beam writing

Indexed keywords

DATA ACQUISITION; ELECTROPLATING; ION SOURCES; NANOSTRUCTURED MATERIALS; NICKEL PLATING; PHOTORESISTS; POLYMETHYL METHACRYLATES; PROBES; PROTON BEAMS;

ARBITRARILY SHAPED STRUCTURES; BRAGG REFLECTORS; ION NANOPROBE; PROTON BEAM WRITING (PBW); THREE-DIMENSIONAL STRUCTURES;

MICROSTRUCTURE;

EID: 33746533383     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.04.083     Document Type: Article

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