Concept for processing of silicon check valves by proton beam micromachining

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 409-413

  Ducso Cs ^a   Rajta, I ^b   Furjes P ^a   Baradacs E ^c  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^c UNIVERSITY OF DEBRECEN   (Hungary)

Author keywords

Check valve; Porous silicon; Proton beam micromachining (PBM); Proton beam writing (PBW)

Indexed keywords

DISSOLUTION; ELECTROCHEMICAL ETCHING; MICROFLUIDICS; MICROMACHINING; PROTON BEAMS; PROTON IRRADIATION;

CANTILEVER-TYPE MEMBRANES; MICROBEAM CHAMBERS; PROTON BEAM MICROMACHINING (PBM); PROTON BEAM WRITING (PBW);

POROUS SILICON;

EID: 34250022504     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.054     Document Type: Article

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