3D micromachining of SU-8 polymer with proton microbeam

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 241, Issue 1-4, 2005, Pages 479-485

  Simcic J ^a   Pelicon, P ^a   Rupnik, Z ^a   Mihelic M ^a   Razpet, A ^a   Jenko, D ^a   MacEk M ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

Dose normalization; Micromachining; Proton beam writing; SU 8

Indexed keywords

DEPOSITION; DOSIMETRY; IRRADIATION; MICROSTRUCTURE; POLYMERS; PROTON BEAMS; PROTONS; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL; THROUGHPUT;

BEAM DOSE; DOSE NORMALIZATION; PROTON BEAM WRITING; SU-8;

MICROMACHINING;

EID: 28044455656     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.07.058     Document Type: Conference Paper

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