Proton beam writing of microstructures in silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 357-363

  Breese, M B H ^a   Teo, E J ^a   Mangaiyarkarasi, D ^a   Champeaux, F ^a   Bettiol, A A ^a   Blackwood, D ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; ION BEAMS; MICROMACHINING; MICROSTRUCTURE; PROTON BEAMS;

SEMICONDUCTOR LATTICE; THREE-DIMENSIONAL STRUCTURE;

SILICON;

EID: 33644502899     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.083     Document Type: Conference Paper

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