Maskless proton beam writing in gallium arsenide

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 437-441

  Mistry, P ^a   Gomez Morilla, I ^a   Smith, R C ^a   Thomson, D ^a   Grime, G W ^a   Webb, R P ^a   Gwilliam, R ^a   Jeynes, C ^a   Cansell, A ^a   Merchant, M ^a   Kirkby, K J ^a  

^a UNIVERSITY OF SURREY   (United Kingdom)

Author keywords

Gallium arsenide; Proton beam writing

Indexed keywords

ASPECT RATIO; COMPUTER SIMULATION; ELECTROCHEMISTRY; ETCHING; MICROSTRUCTURE; SEMICONDUCTING GALLIUM ARSENIDE;

CARRIER REMOVAL; IRRADIATED REGIONS; PROTON BEAM WRITING;

PROTON BEAMS;

EID: 34249915029     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.059     Document Type: Article

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