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Volumn 250, Issue 1-2, 2003, Pages 209-214

A continuous Czochralski silicon crystal growth system

Author keywords

A1. Computer simulation; A2. Czochralski method; A2. Growth from melt; A2. Industrial crystallization; A2. Single crystal growth; B2. Semiconducting silicon

Indexed keywords

COMPUTER SIMULATION; CRYSTALLIZATION; SILICON WAFERS; TURBULENT FLOW;

EID: 0037373485     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(02)02241-8     Document Type: Conference Paper
Times cited : (36)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.