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Volumn 250, Issue 1-2, 2003, Pages 209-214
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A continuous Czochralski silicon crystal growth system
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Author keywords
A1. Computer simulation; A2. Czochralski method; A2. Growth from melt; A2. Industrial crystallization; A2. Single crystal growth; B2. Semiconducting silicon
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Indexed keywords
COMPUTER SIMULATION;
CRYSTALLIZATION;
SILICON WAFERS;
TURBULENT FLOW;
FEEDING COMPARTMENTS;
CRYSTAL GROWTH FROM MELT;
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EID: 0037373485
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(02)02241-8 Document Type: Conference Paper |
Times cited : (36)
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References (11)
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