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Volumn 257, Issue 1-2, 2003, Pages 7-18
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Physical modelling of the melt flow during large-diameter silicon single crystal growth
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Author keywords
A1. Fluid flows; A1. Heat transfer; A1. Modelling; A2. Czochralski method; A2. Single crystal growth; B2. Semiconducting silicon
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Indexed keywords
CRYSTALLIZATION;
EUTECTICS;
FLOW OF FLUIDS;
HEAT TRANSFER;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTING SILICON;
SINGLE CRYSTALS;
THERMAL EFFECTS;
X RAY RADIOGRAPHY;
CRUCIBLE ROTATIONS;
CRYSTAL GROWTH FROM MELT;
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EID: 0043011667
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(03)01376-9 Document Type: Article |
Times cited : (32)
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References (11)
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