2D electro-thermal microgrippers with large clamping and rotation motion at low driving voltage

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 687-690

  Duc, T Chu ^a   Lau, G K ^a   Wei, J ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

2d microgripper; Constrained polymer; Electro thermal actuator; Forward actuator

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; REACTIVE ION ETCHING; ROTATION; SILICON;

2D MICROGRIPPER; CONSTRAINED POLYMER; COUNTER-CLOCK-WISE; ELECTRO-THERMAL ACTUATOR; FORWARD ACTUATOR; INTERNATIONAL CONFERENCES; LOW DRIVING VOLTAGES; MICRO GRIPPERS; MICRO-ELECTRO MECHANICAL SYSTEMS; ROTATION MOTIONS; WORKING TEMPERATURES;

GRIPPERS;

EID: 52249084530     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. M. Mita, H. Kawara, H. Toshiyoshi, M. Ataka, H. Fujita, "An electrostatic 2-dimensional microgripper for nano structure", 12th Solid State Sensors, Actuators and Microsystems, pp. 272-275, 2003.
2. N. Chronis, and L.P. Lee, "Electrothermally activated SU-8 microgripper for single cell manipulation in solution", J. MEMS, vol. 14, no. 4, pp. 857-863, 2005.
3. N.T. Nguyen, S. S. Ho, and C.L.N. Low, "A polymeric microgripper with integrated thermal actuators", J. Micromech. Microeng. vol. 14, pp. 967-974, 2004.
4. A. N. Gent, E. A. Meinecke, "Compression, bending, and shear of bonded rubber blocks", J. Polymer Eng. Sci., vol. 10, no. 1, pp. 48-53, 1970.
5. S. D. Senturia, "Microsystem design", Kluwer Acedamic Publ., 2001.
6. H. Lorenz, M. Laudon, P. Renaud, "Mechanical characterization of a new high-aspect-ratio near UV-photoresist," Microelectron. Eng., vol. 41-42, pp. 371-374, 1998.
7. L. Dellmann, S. Roth, C. Beuret, G.A. Racine, H. Lorenz, M. Despont, P. Renaud, P. Vettiger, N.F. de Rooij, "Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications," in Proc. Int. Conf. Solid-State Sens. Actuators, pp. 641-644, 1997.
8. G. Voskericiana, M.S. Shivea, R.S. Shawgoc, H. von Recumd, J.M. Andersona, M.J. Cimac, R. Langere, "Biocompatibility and biofouling of MEMS drug delivery devices", Biomaterials, vol 24, pp. 1959-1967, 2003.
9. th IEEE conference on Sensor, 2006.
10. http://www.cascademicrotech.com/index.cfm/fuseaction/pg.view/pID/57