Integrated silicon-polymer laterally stacked bender for sensing microgrippers

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 662-665

  Duc, T Chu ^a   Wei, J ^a   Sarro, P M ^a   Lau, G K ^b  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ALUMINA; ALUMINUM; GRIPPERS; LIGHT METALS; NONMETALS; OPTICAL DESIGN; POLYMERS; REACTIVE ION ETCHING; REACTIVE SPUTTERING; SENSORS; SERPENTINE; SILICATE MINERALS; THICK FILMS;

ALUMINUM SPUTTERING; DEEP REACTIVE ION ETCHING; DRIVING VOLTAGES; MICRO GRIPPERS; POWER CONSUMPTION; SILICON STRUCTURES; THIN FILM ALUMINUM; WORKING TEMPERATURES;

SILICON;

EID: 50149121394     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355555     Document Type: Conference Paper

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