Characteristics of dual mode AlN thin film bulk acoustic wave resonators

2008 IEEE International Frequency Control Symposium, FCS

Volumn , Issue , 2008, Pages 609-614

  Chen, Qingming ^a   Li, Fang ^b   Cheng, Hongbin ^b   Wang, Qing Ming ^b  

^a KUNMING UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b University of Pittsburgh   (United States)

Author keywords

AlN thin film; Dual mode resonator; FBAR

Indexed keywords

ALN THIN FILM; ALN THIN FILMS; APPROPRIATE MATERIALS; C -AXIS; COORDINATE SYSTEMS; CRYSTALLINE ORIENTATIONS; DUAL MODE RESONATOR; DUAL MODES; EFFECTIVE MATERIAL PROPERTIES; FBAR; FILM BULK ACOUSTIC WAVE RESONATORS; FREQUENCY CHARACTERISTICS; LONGITUDINAL MODES; MATERIAL PROPERTIES; NORMAL DIRECTIONS; POLARIZATION ANGLES; PROCESSING CONDITIONS; RESEARCH ACTIVITIES; SHEAR MODES; SUBSTRATE SURFACES; THEORETICAL MODELS; THICKNESS SHEARS; THIN FILM RESONATORS;

ACOUSTIC EQUIPMENT; ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ACOUSTICS; ELASTIC WAVES; ELECTRIC IMPEDANCE; ELECTRIC IMPEDANCE MEASUREMENT; MATERIALS PROPERTIES; POLARIZATION; RESONATORS; SOLIDS; THICK FILMS; THIN FILM DEVICES; VAPOR DEPOSITION; WAVE FILTERS;

THIN FILMS;

EID: 55649095286     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2008.4623072     Document Type: Conference Paper

References (32)

1. Markku Ylilammi, Juha Ellä, Meeri Partanen, Jyrki Kaitila, "Thin film bulk acoustic wave filter," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 49, 4 (2002), p.535-539.
2. K.M. Lakin, G.R. Kline and K.T. McCarron, "High Q microwave acoustic resonators and filters," IEEE Transactions on Microwave Theory a. Techniques 41 (1993), p. 2139.
3. K.M. Lakin, G.R. Kline and K.T. McCarron, "Development of miniature filters for wireless applications," IEEE Transactions on Microwave Theory a. Techniques 43 (1995), p. 2933.
4. K. M. Lakin, "Thin film resonators and filters," IEEE Ultrasonics Symposium, Lake Tahoe (1999), p. 895.
5. M. A. Dubois, Muralt, P. and Plessky, Y., "BAW resonator based on AlN thin films," IEEE Ultrasonics Symposium, Lake Tahoe (1999), p. 907.
6. P. Osbond, C. M. Beck, C. J. Brierley, M. R. Cox, S.P. Marsh, and N. M. Shorrocks, "Influence of ZnO and electrode thickness on the performance of thin film bulk acoustic wave resonators," 1999 IEEE Ultrasonics Symposium, Lake Tahoe (1999), p. 911.
7. R.S. Naik, R. Reif, J.S. Lutsky and C.G. Sodni, "Low temperature deposition of highly textured aluminum nitride by direct current magnetron sputtering for application in thin film resonators," J. Electrochem. Soc. 146 (1999), p. 691.
8. M.A. Dubois and P. Murait, "Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications," Appl. Phys. Lett. 74 (1999), p. 3023.
9. M. A. Dubois, P. Muralt, H. Matsumoto, and V. Plessky, "Solidly mounted resonator based on aluminum nitride thin film," 1998 IEEE Ultrasonics Symposium, (1998), p. 909.
10. C.-L. Huang, K.-W. Tay, and L. Wu, "Fabricaiton and performance analysis of film bulk acoustic wave resonaotrs," Material Letters, vol. 59, pp. 1012-1016, 2005
11. R. Weigel, D. P. Morgan, J. M. Owens, A. Ballato, K. M. Lakin, K.-y. Hashimoto, and C. C. W. Ruppel , "Microwave Acoustic Materials, Devices, and Applications," IEEE Trans. On microwave theory and Techniques, vol. 50, pp. 738-749, Mar. 2002.
12. K. M. Lakin, "Thin film resonators and filters," IEEE Ultrasonic Symposium, pp. 895-906, 1999.
13. Qing-Xin Su, and Paul Kirby, "Thin-film bulk acoustic resonators and filters using ZnO and Lead-Zirconium-Titanate thin films," IEEE Transactions on Microwave Theory and Techniques, vol. 49, pp. 769-778, 2001.
14. B. Drafts, "acoustic wave technology sensors," IEEE Transactions on Microwave Theory and Techniques," vol. 49, pp. 795-802, 2001.
15. P. M. Martin, "Piezoelectric films for 100-MHz ultrasonic Transducers," Thin Solid Films, vol. 379, pp. 253-258, 2000.
16. S.V. Krishnaswamy, J. Rosenbaum, S. Horwitz, C. Vale and R. A. Moore, "Film Bulk Acoustic Wave resonator Technology," IEEE Ultrasonic Symposium, pp. 529-536, 1990.
17. H.P.Löbl, M. Klee, R. Milsom, R. Dekker, C. Metzmacher, W. Brand, and P. Lok, "Materials for bulk acoustic wave (BAW) resonators and filters, " J. Eur. Ceram. Soc., vol. 21, pp. 2633-2640, 2001.
18. J. D.Larson III, R. Ruby, P. Bradley, and Y. Oshmyansky, "A BAW antenna duplexer for the 1900 MHz PCS band," IEEE Ultrasonics Symposium, Lake Tahoe (1999), p. 887.
19. T. Yanagitani, T. Nohara, M. Matsukawa, Y. Watanabe, and T. Otani, "Characteristics of (10 0) and (11 0) Textured ZnO Piezofilms for a Shear Mode Resonator in the VHF-UHF Frequency Ranges," IEEE Trans. Ultrason., Ferroelect, Freq. Contr., vol. 52, pp. 2140-2145, Nov. 2005.
20. 15 of Polycrystalline ZnO Films with the c-Axes Lie in the Substrate Plane," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 54, pp. 701-704, Apr. 2007.
21. M. Link, M. Schreiter, J. Weber, R. Primig, D. Pitzer, and R. Gabl, "Solidly mounted ZnO Shear Mode Film Bulk Acoustic Resonators for Sensing Applications in Liquids," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, pp. 492-496, Feb. 2006
22. R. H. Wittstruck, X. Tong, N. W. Emanetoglu, P. Wu, Y. Chen, J. Zhu, S. Muthukumar, Y. Lu, and A. Ballato, "Characteristics of MgxZnl-xO Thin Film Bulk Acousitc Wave Devices," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 1272-1278, Oct. 2003.
23. F. Martin, M.-E. Jan, S. Rey-Mermet, B. Belgacem, D. Su, M. Cantoni, and P. Murait, "Shear Mode Coupling and Tilted Grain Growth of AlN Thin Films in BAW Resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, pp. 1339-1343, Jul. 2006.
24. F. Martin, M.-E. Jan, B. Belgacem, M.-A. Dubois, P. Muralt, "Shear mode coupling and properties dispersion in 8GHz range AIN min film bulk acoustic wave (BAW) resonator," Thin Solid Films, vol. 514, pp. 341-343, 2006.
25. J. Bjurström, D. Rosén, I. Katardjiev, V. M. Yanchev, and I. Petrov, "Dependence of the Electromechanical Coupling on the Degree of Orientation of c-Textured Thin AlN Films," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, pp. 1347-1353, Oct. 2004.
26. G. Wingqvist, J. Bjurström, L. Liljeholm, I. Katardjiev, and A. L. SpetZ, "Shear mode AlN thin film electroacoustic resonator for biosensor applications," Sens., 2005 IEEE, pp. 492-495, 2005.
27. J. Bjurström, G. Wingqvist, and I. Katardjiev, "Synthesis of Textured Thin Piezoelectric AlN Films With a Nonzero C-Axis Mean Tilt for the Fabrication of Shear Mode Resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 53, pp. 2095-2100, Nov. 2006.
28. G. Wingqvist, J. Bjurström, L. Liljeholm, V. Yantchev, and I. Katardjiev, "Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media," Sens. Actuator. B, vol. 123, pp. 466-473, 2007.
29. J. F. Rosenbaum, "Bulk Acoustic Waves Theory and Devices," Artech House, 1988.
30. G. Bu, D. Ciplys, M. Shur, L. J. Schowalter, S. Schujman, and R. Gaska, "Electromechanical coupling coefficient for surface acoustic waves in single-crystal bulk aluminum nitride," Appl. Phys. Lett., vol. 84, pp. 4611-4613, Jun. 2004.
31. K. Tsubouchi, K. Sugai, and N. Mikoshiba, "AlN Material Constants Evaluation and SAW Properties on AlN/Al2O3and AIN/Si," Ultrasonics Symposium, pp. 375-380, 1981.
32. Q. Chen, and Q.-M. Wang, "The effective electromechanical coupling coefficient of piezoelectric thin-film resonators," Appl. Phys. Lett., vol. 86, 022904, 2005.