Influence of ZnO and electrode thickness on the performance of thin film bulk acoustic wave resonators

Proceedings of the IEEE Ultrasonics Symposium

Volumn 2, Issue , 1999, Pages 911-914

  Osbond, P ^a   Beck, C M ^a   Brierly, C J ^a   Cox, M R ^a   Marsh, S P ^a   Shorrocks, N M ^a  

^a Marconi Materials Technology   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODE THICKNESS; THIN FILM BULK ACOUSTIC WAVE RESONATORS;

ACOUSTIC RESONATORS; ELECTRIC PROPERTIES; ELECTRODES; ELECTRONIC EQUIPMENT MANUFACTURE; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; THIN FILM DEVICES; X RAY DIFFRACTION; YIELD STRESS; ZINC COMPOUNDS;

ACOUSTIC BULK WAVE DEVICES;

EID: 0033294874     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)