Solidly mounted resonator based on aluminum nitride thin film

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 1998, Pages 909-912

  Dubois, M A ^a   Muralt, P ^a   Matsumoto, H ^a   Plessky, V ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ALUMINUM COMPOUNDS; DIELECTRIC FILMS; ELECTRODES; FILM GROWTH; NITRIDES; PIEZOELECTRIC DEVICES; PIEZOELECTRICITY; RESONANCE; SPUTTER DEPOSITION; STRESS ANALYSIS; THIN FILM DEVICES;

ALUMINUM NITRIDE; PIEZOELECTRIC COEFFICIENT; SOLIDLY MOUNTED RESONATORS (SMR);

ACOUSTIC RESONATORS;

EID: 0032283766     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)