Electromechanical coupling coefficient k15 of polycrystalline ZnO films with the c-axes lie in the substrate plane

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 4, 2007, Pages 701-704

  Yanagitani, Takahiko ^a   Mishima, Natsuki ^a   Matsukawa, Mami ^a   Watanabe, Yoshiaki ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AXIS ALIGNMENTS; ELECTRO-MECHANICAL COUPLING COEFFICIENTS; GLASS SUBSTRATES; HIGH SHEARS; LAYERED STRUCTURES; METAL ELECTRODES; OVERMODED; PIEZOELECTRIC FILMS; POLYCRYSTALLINE ZNO; RESONANT SPECTRUMS; SUBSTRATE PLANES; ZNO;

ELECTROMECHANICAL COUPLING; ELECTROMECHANICAL DEVICES; METALLIC FILMS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SPUTTER DEPOSITION; STRUCTURAL METALS; ZINC OXIDE;

SEMICONDUCTING ZINC COMPOUNDS;

ZINC OXIDE;

ARTIFICIAL MEMBRANE; CHEMISTRY; COMPUTER AIDED DESIGN; COMPUTER SIMULATION; CRYSTALLIZATION; ELASTICITY; ELECTRONICS; EVALUATION; IMPEDANCE; LETTER; MECHANICS; STRESS; THEORETICAL MODEL; TRANSDUCER; ULTRASOUND;

COMPUTER SIMULATION; COMPUTER-AIDED DESIGN; CRYSTALLIZATION; ELASTICITY; ELECTRIC IMPEDANCE; ELECTRONICS; MECHANICS; MEMBRANES, ARTIFICIAL; MODELS, THEORETICAL; STRESS; TRANSDUCERS; ULTRASONICS; ZINC OXIDE;

EID: 34248586220     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.303     Document Type: Article

References (17)

1. J. S. Wang, K. M. Lakin, and A. R. Landin, "Sputtered c-axis inclined piezoelectric films and shear wave resonators," in Proc IEEE Freq. Contr. Symp., 1983, pp. 144-150.
2. J. S. Wang and K. M. Lakin, "c-axis inclined ZnO piezoelectric shear wave films," Appl. Phys. Lett., vol. 4, no. 4, pp. 352-354, 1983.
3. N. F. Foster, "Performance of shear mode zinc oxide thin-film ultrasonic transducer," J. Appl. Phys., vol. 40, pp. 4202-4204, May 1969.
4. S. V. Krishnaswamy, B. R. McAvoy, and A. Moore, "Effect of RF bias on sputter deposition ZnO films for shear mode transducer," in Proc. IEEE Ultrason. Symp., 1983, pp. 531-534.
5. M. Kadota and T. Miura, "Shear bulk wave transducer made of (110)-plane epitaxial ZnO film on R-sapphire," Jpn. J. Appl. Phys., vol. 41, pp. 3281-3284, May 2002.
6. 1-xO thin film bulk acoustic wave devices," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 1272-1277, Oct. 2003.
7. 3," in Proc. IEEE Ultrason. Symp., 2001, pp. 215-219.
8. R., Ruby, P. Bradley, J. D. Larson, III, and Y. Oshmyansky, "PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBAR)," Electron. Lett., vol. 35, pp. 794-795, 1999.
9. T. Nishihara, T. Yokoyama, T. Miyashita, and Y. Satoh, "High performance and miniature thin film bulk acoustic wave filters for 5 GHz," Proc. IEEE Ultrason. Symp., 2002, pp. 969-972.
10. H. P. Loebl, C. Metzmacher, D. N. Peligrad, R. Mauczok, M. Klee, W. Brand, R. F. Milsom, P. Lok, F. van Straten, A. Tuinhout, and J. W. Lobeek, "Solidly mounted bulk acoustic wave filters for the GHz frequency range," in Proc. IEEE Ultrason. Symp., 2002, pp. 897-901.
11. T. Yanagitani, S. Tomohiro, T. Nohara, M. Matsukawa, Y. Watanabe, and T. Otani, "Characterization of (1120) textured ZnO films fabricated by RF magnetron sputtering," Jpn. J. Appl. Phys., vol. 43, pp." 3004-3007, May 2004.
12. T. Yanagitani, M. Matsukawa, Y. Watanabe, and T. Otani, "Formation of uniaxially (112̄0) textured ZnO film on glass substrates," J. Crystal Growth, vol. 276, pp. 424-430, Apr. 2005.
13. T. Yanagitani, T. Nohara, M. Matsukawa, Y. Watanabe, and T. Otani, "Shear wave transducer using (112̄0) textured ZnO film," in Proc. IEEE Ultrason. Symp., 2004, pp. 906-909.
14. T, Yanagitani, T. Nohara, M. Matsukawa, Y. Watanabe, and T. Otani, "Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 52, pp. 2140-2145, Nov. 2005.
15. Y. Miyamoto, T. Yanagitani, M. Matsukawa, and Y. Watanabe, "Effect of sputtering geometry on the (112̄0) textured ZnO piezofilm," Acoust. Sci. Tech., vol. 27, no. 1, pp. 53-55, 2006.
16. Y. Zhang, Z. Wang, and J. D. N. Cheeke, "Resonant spectrum method to characterize piezoelectric films in composite resonators," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 321-333, Mar. 2003.
17. W. P. Mason, Physical Acoustics. vol. 1, pt. A, New York: Academic, 1964.