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Volumn 2, Issue , 1999, Pages 907-910

BAW resonators based on aluminum nitride thin films

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ALUMINUM COMPOUNDS; COMPUTER SIMULATION; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; PLATINUM; SILICA; THIN FILMS;

EID: 0033293807     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (57)

References (5)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.