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Volumn 2, Issue , 1999, Pages 907-910
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BAW resonators based on aluminum nitride thin films
a a a
a
EPFL
(Switzerland)
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC RESONATORS;
ALUMINUM COMPOUNDS;
COMPUTER SIMULATION;
MAGNETRON SPUTTERING;
PIEZOELECTRIC MATERIALS;
PLATINUM;
SILICA;
THIN FILMS;
ALUMINUM NITRIDE THIN FILMS;
SOLIDLY MOUNTED RESONATOR;
THIN FILM BULK ACOUSTIC RESONATOR;
ZERO THERMAL FREQUENCY DRIFT;
ACOUSTIC BULK WAVE DEVICES;
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EID: 0033293807
PISSN: 10510117
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (57)
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References (5)
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