Characteristics of MgxZn1-xO thin film bulk acoustic wave devices

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 50, Issue 10, 2003, Pages 1272-1278

  Wittstruck, Richard H ^a   Tong, Xiaojun ^a   Emanetoglu, Nuri W ^a   Wu, Pan ^a   Chen, Yimin ^a   Zhu, Jun ^a   Muthukumar, Sriram ^a   Lu, Yicheng ^a   Ballato, Arthur ^b  

^a Department of Electrical and Computer Engineering   (United States)

^b US Army Communications and Electronics Command   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ALUMINA; COMPUTER SIMULATION; ELECTRODES; FREQUENCY RESPONSE; MAGNESIUM ALLOYS; THIN FILMS; TRANSMISSION LINE THEORY; ZINC OXIDE;

ELECTROMECHANICAL COUPLING; MAGNESIUM ZINC OXIDE; SHEAR BULK WAVE PROPAGATION;

ACOUSTIC BULK WAVE DEVICES;

MAGNESIUM DERIVATIVE; ZINC OXIDE;

ACOUSTICS; ARTICLE; CHEMICAL MODEL; CHEMISTRY; COMPUTER SIMULATION; ELECTROCHEMISTRY; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; IMPEDANCE; INSTRUMENTATION; METHODOLOGY; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; SYNTHESIS; TRANSDUCER; VALIDATION STUDY;

ACOUSTICS; COMPUTER SIMULATION; ELECTRIC IMPEDANCE; ELECTROCHEMISTRY; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MAGNESIUM COMPOUNDS; MODELS, CHEMICAL; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; TRANSDUCERS; ZINC OXIDE;

EID: 0346255415     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2003.1244743     Document Type: Article

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