Fabrication and performance analysis of film bulk acoustic wave resonators

Materials Letters

Volumn 59, Issue 8-9, 2005, Pages 1012-1016

  Huang, Cheng Liang ^a   Tay, Kok Wan ^a   Wu, Long ^a,b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b F tech Corporation   (Taiwan)

Author keywords

C axis; Piezoelectric; RF sputtering; Surface morphology; Thin film

Indexed keywords

ACOUSTIC WAVE VELOCITY; ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; MORPHOLOGY; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; RADIO WAVES; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

C-AXIS-PREFERRED ORIENTATION; ELECTROMECHANICAL COUPLING COEFFICIENTS; FILM BULK ACOUSTIC RESONATORS (FBAR); RADIO FREQUENCY (RF) SPUTTERING;

ACOUSTIC RESONATORS;

EID: 13444271898     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2004.11.047     Document Type: Article

References (10)

1. Richard C. Ruby, Pail Bradley, Yury Oshmyansky, and Allen Chien IEEE Ultrason. Symp. 2001 813
2. John D. Larson III, S.M. Richard, C. Ruby, Paul D. Bradley, Paul D. Bradley, S.M. Joe Wen, Shong-Lam Kok, and Allen Chien IEEE Ultrason. Symp. 2000 869
3. R. Ruby, J.D. Larson, P. Bradley, and Y. Oshmyansky IEEE Int. Solid-State Circuits Conf. 2001 120
4. K.M. Lakin, J.S. Wang, G.R. Kline, A.R. Landin, Y.Y. Chen, and J.D. Hunt IEEE Ultrasonic Symp. Proceedings, San Diego, Ca vol. 1 1982 466
5. K.M. Lakin, G.R. Kline, and K.T. McCarron IEEE MIT-S Dig. 1995 833
6. S.M. Sze, John Wiley and Sons, New York, 2nd edition, (1981).
7. K.W. Tay, L. Wu, C.L. Huang, and M.S. Lin IEEE Ultrason. Symp. 2003 464
8. IEEE Standard on Piezoelectricity, ANS/IEEE Std 176 (1987).
9. J.L. Josept, S.N. Rajan, R. Rief, and G.S. Charles IEDM 96 1996 4.4.1 4.4.4
10. J.F. Rosenbaum Norwood 1988 Artech House Massachusetts 167