Characteristics of (101̄0) and (112̄0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 11, 2005, Pages 2140-2145

  Yanagitani, Takahiko ^a,b,c   Nohara, Takuya ^a,b   Matsukawa, Mami ^a,b,c   Watanabe, Yoshiaki ^a,b   Otani, Takahiko ^b,c  

^a IEEE   (Japan)

^b Faculty of Engineering   (Japan)

^c DOSHISHA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FREQUENCIES; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

CRYSTALLITES; MODE RESONATORS; RADIO FREQUENCIES (RF); ZNO PIEZOFILMS;

RESONATORS;

ZINC OXIDE;

ARTICLE; ARTIFICIAL MEMBRANE; CERAMICS; CHEMISTRY; COMPUTER SIMULATION; ECHOGRAPHY; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; MECHANICAL STRESS; METHODOLOGY; RADIATION EXPOSURE; RADIOFREQUENCY RADIATION; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; SHEAR STRENGTH; THEORETICAL MODEL; TRANSDUCER;

CERAMICS; COMPUTER SIMULATION; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MEMBRANES, ARTIFICIAL; MODELS, THEORETICAL; RADIO WAVES; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SHEAR STRENGTH; STRESS, MECHANICAL; TRANSDUCERS; ULTRASONOGRAPHY; ZINC OXIDE;

EID: 29144506296     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1561685     Document Type: Article

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