Air damping of microbeam rsonators in a low vacuum

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 772-775

  Ye, Wenjmg ^a   Hutcherson, Same ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b The Timken Corporation   (United States)

Author keywords

Air damping; Micro resonators; Molecular Dynamics simulation; Quality factor

Indexed keywords

COMPUTER SIMULATION; DAMPING; MICROELECTROMECHANICAL DEVICES; MOLECULAR DYNAMICS; NATURAL FREQUENCIES; OSCILLATIONS; VACUUM;

AIR DAMPING; MICRO RESONATORS; MOLECULAR DYNAMICS SIMULATION; QUALITY FACTOR;

RESONATORS;

EID: 27544512166     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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