Cantilever with integrated resonator for application of scanning probe microscope

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 11-16

  Lee, D W ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; FINITE ELEMENT METHOD; MICROACTUATORS; MICROMACHINING; NATURAL FREQUENCIES; OSCILLATIONS; RESONATORS; SILICON; VIBRATION CONTROL;

SCANNING PROBE MICROSCOPE (SPM);

MICROELECTROMECHANICAL DEVICES;

EID: 0033733075     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00378-7     Document Type: Article

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