Phonon-boundary scattering in ultrathin single-crystal silicon layers

Applied Physics Letters

Volumn 84, Issue 19, 2004, Pages 3819-3821

  Liu, W ^a   Asheghi, M ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN TRANSPORT EQUATION; ELECTRICAL-RESISTANCE THERMOMETRY; JOULE HEATING; PHONON-BOUNDARY SCATTERING; THERMAL ENGINEERING;

ACOUSTIC WAVE SCATTERING; ACTUATORS; DOPING (ADDITIVES); ETCHING; HEAT CONDUCTION; LATTICE CONSTANTS; MICROELECTROMECHANICAL DEVICES; PHONONS; SENSORS; SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SURFACE ROUGHNESS; THERMAL CONDUCTIVITY;

ULTRATHIN FILMS;

EID: 2942606508     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1741039     Document Type: Article

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