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Volumn , Issue , 2006, Pages 15-21

Overview and emerging challenges in mechanical dicing of silicon wafers

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; COPPER; ELECTRONICS PACKAGING; NONMETALS; SILICON; SILICON WAFERS; TECHNOLOGY;

EID: 50249102910     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EPTC.2006.342684     Document Type: Conference Paper
Times cited : (9)

References (30)
  • 1
    • 0023594026 scopus 로고
    • Horizontal Die Cracking as a Yield and Reliability Problem in Integrated Circuit Devices
    • Dec
    • Yehya M. Kasem and Leo G.Feinstein, "Horizontal Die Cracking as a Yield and Reliability Problem in Integrated Circuit Devices," IEEE Transactions on Components, Hybrids and Manufacturing Technology, Vol CHMT-12, No. 4, Dec 1987, pp. 654-661.
    • (1987) IEEE Transactions on Components, Hybrids and Manufacturing Technology , vol.CHMT-12 , Issue.4 , pp. 654-661
    • Kasem, Y.M.1    Feinstein, L.G.2
  • 4
    • 28044459141 scopus 로고    scopus 로고
    • Methods for Searching the Cause of Crack
    • Singapore, May
    • th IPFA, Singapore, May, 2005, pp.222-225.
    • (2005) th IPFA , pp. 222-225
    • Zhang, B.1
  • 5
    • 50249128928 scopus 로고    scopus 로고
    • International Technology Roadmap for Semiconductors, ITRS 2005 edition
    • International Technology Roadmap for Semiconductors - ITRS 2005 edition
  • 7
    • 33845566704 scopus 로고    scopus 로고
    • Dicing Die Attach Films for High Volume Stacked Die Application
    • San Diego, FL, USA, June
    • Annette Teng Cheung, "Dicing Die Attach Films for High Volume Stacked Die Application," Proc. 56th Electronic Components and Technology Conference, San Diego, FL, USA, June 2006, pp. 1312-1316.
    • (2006) Proc. 56th Electronic Components and Technology Conference , pp. 1312-1316
    • Teng Cheung, A.1
  • 10
    • 50249179370 scopus 로고    scopus 로고
    • New Dicing and Thinning Concept Improves Mechanical Reliability of Ultra Thin Silicon
    • Braselton, Georgia, March
    • Landesberger et al, "New Dicing and Thinning Concept Improves Mechanical Reliability of Ultra Thin Silicon", International Symposium and Exhibition on Materials, Braselton, Georgia, March 2001, pp. 22-27
    • (2001) International Symposium and Exhibition on Materials , pp. 22-27
    • Landesberger1
  • 11
    • 33845598483 scopus 로고    scopus 로고
    • Novel Wafer Dicing and Chip Thinning Technologies Realizing High Chip Strength
    • San Diego, FL, USA, June
    • Shinya Takyu et al, "Novel Wafer Dicing and Chip Thinning Technologies Realizing High Chip Strength", Proc. 56th Electronic Components and Technology Conference, San Diego, FL, USA, June 2006, pp. 1623-1627.
    • (2006) Proc. 56th Electronic Components and Technology Conference , pp. 1623-1627
    • Takyu, S.1
  • 12
    • 33845561906 scopus 로고    scopus 로고
    • Thinning and Singulation of Silicon: Root Causes of the Damage in Thin Chips
    • San Diego, FL, USA, June
    • Werner Kröninger and Franco Mariani, "Thinning and Singulation of Silicon: Root Causes of the Damage in Thin Chips", Proc. 56th Electronic Components and Technology Conference, San Diego, FL, USA, June 2006, pp. 1317-1322
    • (2006) Proc. 56th Electronic Components and Technology Conference , pp. 1317-1322
    • Kröninger, W.1    Mariani, F.2
  • 13
    • 32444441084 scopus 로고    scopus 로고
    • Study on the Effects of Wafer Thinning and Dicing on Chip Strength
    • February
    • Shoulung Chen et al, "Study on the Effects of Wafer Thinning and Dicing on Chip Strength", IEEE Transactions on Advanced Packaging, Vol. 29, No. 1, February 2006, pp. 149-157.
    • (2006) IEEE Transactions on Advanced Packaging , vol.29 , Issue.1 , pp. 149-157
    • Chen, S.1
  • 14
    • 32144439695 scopus 로고    scopus 로고
    • Effect of Laminated Wafer Toward Dicing Process and Alternative Double Pass Sawing Method to Reduce Chipping
    • Jan
    • Hoy Huey Jiun et al, "Effect of Laminated Wafer Toward Dicing Process and Alternative Double Pass Sawing Method to Reduce Chipping," IEEE Transactions on Electronics Packaging Manufacturing, Vol 29, No. 1 Jan 2006.
    • (2006) IEEE Transactions on Electronics Packaging Manufacturing , vol.29 , Issue.1
    • Huey Jiun, H.1
  • 15
    • 0036294558 scopus 로고    scopus 로고
    • A Comparison Between Single Versus Dual Spindle Saw Processes for Copper Metallized Wafers
    • San Diego, California, May
    • Mark Gerber and Noel Arguello, "A Comparison Between Single Versus Dual Spindle Saw Processes for Copper Metallized Wafers," Proc. 52nd Electronic Components and Technology Conference, San Diego, California, May 2002, pp. 1167-1171.
    • (2002) Proc. 52nd Electronic Components and Technology Conference , pp. 1167-1171
    • Gerber, M.1    Arguello, N.2
  • 18
    • 50249083602 scopus 로고    scopus 로고
    • US Patent no. 7,109,093
    • John A.Fitzsimmons et al, US Patent no. 7,109,093
    • Fitzsimmons, J.A.1
  • 19
    • 50249171934 scopus 로고    scopus 로고
    • US Patent no. 7,098,676
    • William F.Lamders et al, US Patent no. 7,098,676
    • Lamders, W.F.1
  • 20
    • 50249097467 scopus 로고    scopus 로고
    • Daniel C Edelstein et al, US Patent no. 7,098,544 21. Tze-Liang Lee et al, US Patent no. 6,876,062
    • Daniel C Edelstein et al, US Patent no. 7,098,544 21. Tze-Liang Lee et al, US Patent no. 6,876,062
  • 21
    • 50249183092 scopus 로고    scopus 로고
    • Timothy H. Daubenspeck US Patent no. 6,833,720
    • Timothy H. Daubenspeck US Patent no. 6,833,720
  • 22
    • 50249173063 scopus 로고    scopus 로고
    • Process and Material Evaluation for Pbfree Flip Chip Packaging with 65nm Cu/low-k Technology
    • Paper accepted to be published in, Singapore, Dec
    • Tan A. M. et al, "Process and Material Evaluation for Pbfree Flip Chip Packaging with 65nm Cu/low-k Technology," Paper accepted to be published in Proc. 8th Electronics Packaging Technology Conference, Singapore, Dec 2006.
    • (2006) Proc. 8th Electronics Packaging Technology Conference
    • Tan, A.M.1
  • 23
    • 50249103516 scopus 로고    scopus 로고
    • Timothy H. Daubenspeck US Patent no. 7,112,470
    • Timothy H. Daubenspeck US Patent no. 7,112,470
  • 24
    • 50249180841 scopus 로고    scopus 로고
    • 25.Peter Ramm et al, 3D System Integeration Technologies, Proc. Material Research Society Syposium, 766, 2003, pp. E.5.6.1-E.5.6.12
    • 25.Peter Ramm et al, "3D System Integeration Technologies," Proc. Material Research Society Syposium, Vol. 766, 2003, pp. E.5.6.1-E.5.6.12
  • 26
    • 0041431012 scopus 로고    scopus 로고
    • Selective Wafer-level Adhesive Bonding with Benzocyclobutene for Fabrication of Cavities
    • J.Oberhammer et al, "Selective Wafer-level Adhesive Bonding with Benzocyclobutene for Fabrication of Cavities," Sensors and Actuators A 105, 2003, 297-304
    • (2003) Sensors and Actuators A , vol.105 , pp. 297-304
    • Oberhammer, J.1
  • 28
    • 50249104616 scopus 로고    scopus 로고
    • US Patent no. 5,362,681
    • Roberts Jr. et al, US Patent no. 5,362,681
    • Roberts Jr1
  • 30
    • 0033721565 scopus 로고    scopus 로고
    • A Low Temperature Biochemically Compatible Bonding Technique Using Fluoropolymers for Biochemical Microfludic Systems
    • IEEE MEMS, Miyazaki, Japan
    • Arum Han et al, "A Low Temperature Biochemically Compatible Bonding Technique Using Fluoropolymers for Biochemical Microfludic Systems," Proc. The Thirteenth IEEE International Micro Electro Mechanical Systems Conference (IEEE MEMS 2000), Miyazaki, Japan, 2000, pp. 414-418.
    • (2000) Proc. The Thirteenth IEEE International Micro Electro Mechanical Systems Conference , pp. 414-418
    • Han, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.