Study of MOS capacitors with TiO2 and SiO2/TiO2 gate dielectric

Journal of Integrated Circuits and Systems

Volumn 2, Issue 2, 2007, Pages 89-93

  Albertin, K Franklin ^a   Valle, M A ^a   Pereyra, I ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Double dielectric layer; High dielectrics; MOS capacitors; TiO2

Indexed keywords

EID: 50149087395     PISSN: 18071953     EISSN: 18720234     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (21)

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