SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 10, 1999, Pages 6034-6038

Structural and electrical properties of crystalline TiO2 thin films formed by metalorganic decomposition

(6) Fukuda, Hisashi a,b Namioka, Seigo a Miura, Miho a Ishikawa, Yoshihiro a Yoshino, Masaki a Nomura, Shigeru a

a MURORAN INSTITUTE OF TECHNOLOGY (Japan)

b HOKKAIDO POLYTECHNIC COLLEGE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; CRYSTALLIZATION; DECOMPOSITION; LEAKAGE CURRENTS; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; THIN FILMS; TITANIUM OXIDES;

METALORGANIC DECOMPOSITION;

SEMICONDUCTING FILMS;

EID: 0033317772 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.38.6034 Document Type: Article

Times cited : (53)

References (22)

1
- 0028516346
- P. Löbl, M. Huppcrlz and D. Mergel: Thin Solid Films 251 (199-4) 72.
- (1994) Thin Solid Films , vol.251 , pp. 72
- Löbl, P.¹ Huppcrlz, M.² Mergel, D.³

2
- 0000423421
- J.-Y. Gan, Y. C. Chang and T. B. Lvu: Appl. Phys. Lett. 72 (1998) 332.
- (1998) Appl. Phys. Lett. , vol.72 , pp. 332
- Gan, J.-Y.¹ Chang, Y.C.² Lvu, T.B.³

3
- 0015161230
- W. Hcitmann: Appl. Opt. 10 (1971) 2414.
- (1971) Appl. Opt. , vol.10 , pp. 2414
- Hcitmann, W.¹

4
- 0000003834
- H.-K. Ha, M. Yoshimoto, H. Koinuma, B.-K. Moon and H. Islmvara: Appl. Phys. Lett. 68 (1996) 2965.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2965
- Ha, H.-K.¹ Yoshimoto, M.² Koinuma, H.³ Moon, B.-K.⁴ Islmvara, H.⁵

5
- 0027187188
- N. Rausch and E. P. Burie: J. Elcclrochem. Soc. 140 (1993) 145.
- (1993) J. Elcclrochem. Soc. , vol.140 , pp. 145
- Rausch, N.¹ Burie, E.P.²

6
- 0001158030
- H.-S. Kim, D. C. Gilmer, S. A. Campbell and D. L. Polla: Appl. Phys. Lett. 69 (1996) 3860..
- (1996) Appl. Phys. Lett. , vol.69 , pp. 3860
- Kim, H.-S.¹ Gilmer, D.C.² Campbell, S.A.³ Polla, D.L.⁴

7
- 0030865462
- S. A. Campbell, D. C. Gilmer, X.-C. Wang, M.-T. Hsieh, H.-S. Kim, W.L. Gladfeltcr and J. Yan: IEEE Trans. Electron Devices 44 (1997) 104.
- (1997) IEEE Trans. Electron Devices , vol.44 , pp. 104
- Campbell, S.A.¹ Gilmer, D.C.² Wang, X.-C.³ Hsieh, M.-T.⁴ Kim, H.-S.⁵ Gladfeltcr, W.L.⁶ Yan, J.⁷

8
- 33847564637
- S) H. Shin, M. R. De Guirc and A. H. Heuer: J. Appl. Phys. S3 (1995) 3311.
- (1995) J. Appl. Phys. , vol.S3 , pp. 3311
- Shin, H.¹ De Guirc, M.R.² Heuer, A.H.³

9
- 2442440168
- H.-S. Kim, S. A. Campbell, D. C. Gilmer, V. Kaushik, J. Conner, L. Prabhu and A. Anderson: J. Appl. Phys. 85 (1999) 3278.
- (1999) J. Appl. Phys. , vol.85 , pp. 3278
- Kim, H.-S.¹ Campbell, S.A.² Gilmer, D.C.³ Kaushik, V.⁴ Conner, J.⁵ Prabhu, L.⁶ Anderson, A.⁷

10
- 0026124064
- A. Turkovic, M. Ivanda, A. Drasner, V. Vranesa and M. Persin: Thin Solid Films 198(1991)199.
- (1991) Thin Solid Films , vol.198 , pp. 199
- Turkovic, A.¹ Ivanda, M.² Drasner, A.³ Vranesa, V.⁴ Persin, M.⁵

11
- 0029378704
- R. F. Cava, W. F. Peck, Jr. and J. J. Krajewski: Nature 377 (1995) 215.
- (1995) Nature , vol.377 , pp. 215
- Cava, R.F.¹ Peck Jr., W.F.² Krajewski, J.J.³

12
- 0000423421
- J.-Y. Gan, Y. C. Chane and T. B. Wu: Appl. Phys. Leu. 72 (1995) 332.
- (1995) Appl. Phys. Leu. , vol.72 , pp. 332
- Gan, J.-Y.¹ Chane, Y.C.² Wu, T.B.³

13
- 84972865318
- J. Fukushima, K. Kodaira and T. Matsushita: J. Mater. Sei. 19 (1984) 595.
- (1984) J. Mater. Sei. , vol.19 , pp. 595
- Fukushima, J.¹ Kodaira, K.² Matsushita, T.³

14
- 0030212039
- P. C. Joshi and S. B. Dcsu: J. Appl. Phys. 80 (1996) 2349.
- (1996) J. Appl. Phys. , vol.80 , pp. 2349
- Joshi, P.C.¹ Dcsu, S.B.²

15
- 0001414363
- P. C. Joshi, S. Stowcll and S. B. Dcsu: Appl. Phys. Lett. 71 (1997) 1341.
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1341
- Joshi, P.C.¹ Stowcll, S.² Dcsu, S.B.³

16
- 0000161491
- Z. G. Zhang, Y. N. Wang, J. S. Zhu, F. Van, X. M. Lu and H. M. Shen and J. S. Liu: Appl. Phys. Letl. 73 (1998) 3674.
- (1998) Appl. Phys. Letl. , vol.73 , pp. 3674
- Zhang, Z.G.¹ Wang, Y.N.² Zhu, J.S.³ Van F⁴ Lu, X.M.⁵ Shen, H.M.⁶ Liu, J.S.⁷

17
- 0001609511
- G. D. Hu, I. H. Wilson, J. B. Xu, W. Y. Cheung, S. P. Wong and H. K. Wong: Appl. Phys. Lett. 74 (1999) 1221.
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1221
- Hu, G.D.¹ Wilson, I.H.² Xu, J.B.³ Cheung, W.Y.⁴ Wong, S.P.⁵ Wong, H.K.⁶

18
- 0009790797
- P. G. Snydcr, M. C. Rost, H. Bu-Abbud and J. A. Woollam: J. Appl. Phys. 60(1986)3293.
- (1986) J. Appl. Phys. , vol.60 , pp. 3293
- Snydcr, P.G.¹ Rost, M.C.² Bu-Abbud, H.³ Woollam, J.A.⁴

19
- 0003906197
- McGraw-Hill, New York
- F. A. Jcnkins and H. E. White: Fundamentals of Optics (McGraw-Hill, New York, 1957) p. 468.
- (1957) Fundamentals of Optics , pp. 468
- Jcnkins, F.A.¹ White, H.E.²

20
- 0003808259
- Elsevicr, New York, Chap. 4.
- R. M. A. Azzam and N. M. Bashara: Ellipsometry and Polarized Light (Elsevicr, New York, 1977) Chap. 4.
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.A.¹ Bashara, N.M.²

21
- 0000229945
- J. Kreisel, S. Pignard, H. Vincent and J. P. Senateur: Appl. Phys. Lett. 73(1998)1194r
- (1998) Appl. Phys. Lett. , vol.73
- Kreisel, J.¹ Pignard, S.² Vincent, H.³ Senateur, J.P.⁴

22
- 0001188528
- L. M. Terman: Solid-State Electron. 5 (1962) 285.
- (1962) Solid-State Electron. , vol.5 , pp. 285
- Terman, L.M.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.