A micromechanical thermal displacement sensor with nanometre resolution

Nanotechnology

Volumn 16, Issue 8, 2005, Pages 1089-1094

  Lantz, Mark A ^a   Binnig, Gerd K ^a   Despont, Michel ^a   Drechsler, Ute ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; ELECTRIC POTENTIAL; FEEDBACK CONTROL; HEAT CONDUCTION; NANOTECHNOLOGY; SCANNING TUNNELING MICROSCOPY; SENSORS; THERMAL EFFECTS;

AMBIENT AIR; DISPLACEMENT SENSING; NANOMETER; THERMAL DISPLACEMENT SENSORS;

COMPOSITE MICROMECHANICS;

EID: 21144457744     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/8/016     Document Type: Article

References (10)

1. Vettiger P et al 2002 IEEE Trans. Nanotechnol. 1 39
2. Eleftheriou E et al 2003 IEEE Trans. Magn. 39 938
3. Dauderstädt U A, de Vries P H S, Hiratsuka R and Sarro P M 1995 Sensors Actuators A 46/47 201
4. Binnig G, Despont M, Drechsler U, Haeberle W, Lutwyche M, Vettiger P, Mamin H J, Chui B W and Kenny T W 1999 Appl. Phys. Lett. 74 1329
5. Thermal Movement Sensor International Patent Application WO 2004/020328 A1
6. Despont M et al 1999 MEMS'99: 12th IEEE Int. Micro Electro Mechanical Systems Conf. (Orlando, FL, 1999) (Piscataway, NJ: IEEE) Technical digest
7. Despont M et al 2000 Sensors Actuators A 80 1000
8. Bendat J and Piersol A 1986 Random Data Analysis and Measurement Procedures (New York: Wiley-Interscience) p 10
9. Sze S M 1981 Physics of Semiconductor Devices (New York: Wiley)
10. Pantazi A, Lantz M A, Cherubini G, Pozidis H and Eleftheriou E 2004 Nanotechnology 15 S612