Dynamics of silicon micro-heaters: Modelling and experimental identification

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 182-185

  Wiesmann, Dorothea ^a   Sebastian, Abu ^a  

^a IBM RESEARCH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SILICON; THERMAL EFFECTS; THERMOELECTRIC EQUIPMENT;

ANALYTICAL DERIVATION; MICRO HEATERS; SPECIFIC TEMPERATURE; THERMOELECTRIC DYNAMICS;

HEATING EQUIPMENT;

EID: 33750126361     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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