-
2
-
-
0038441780
-
Performance and Reliability of post-CMOS metal/oxide MEMS for RF Application
-
Hill, M., et al., "Performance and Reliability of post-CMOS metal/oxide MEMS for RF Application," J. Micromech. Microeng., Vol. 13, (2003), pp. S131-S138.
-
(2003)
J. Micromech. Microeng
, vol.13
-
-
Hill, M.1
-
3
-
-
0036389076
-
MEMS Packaging - Current Issues and Approaches
-
Denver, CO
-
Dressendorfer, P. V., et al, "MEMS Packaging - Current Issues and Approaches," IEEE 8th Intl. Symp. Advanced Packaging Materials," Denver, CO, 2000, pp. 208-213.
-
(2000)
IEEE 8th Intl. Symp. Advanced Packaging Materials
, pp. 208-213
-
-
Dressendorfer, P.V.1
-
4
-
-
84949937090
-
Fundamental Requirements on MEMS Packaging and Reliability
-
Stone Mountain, Ga, March
-
Persson, K., et al, "Fundamental Requirements on MEMS Packaging and Reliability," Proc. Intl. Conf. Adv. Pack And Sys., Stone Mountain, Ga, March 2002, pp. 1-7.
-
(2002)
Proc. Intl. Conf. Adv. Pack And Sys
, pp. 1-7
-
-
Persson, K.1
-
5
-
-
34548178008
-
Integration of 0/1-Level Packaged RF-MEMS Devices on MCM-D at Millimeter-Wave Frequencies
-
Carchon, G. J., et al., "Integration of 0/1-Level Packaged RF-MEMS Devices on MCM-D at Millimeter-Wave Frequencies," IEEE Trans-Advanced Packaging, Vol. 30, No. 3, (2007), pp. 369-376.
-
(2007)
IEEE Trans-Advanced Packaging
, vol.30
, Issue.3
, pp. 369-376
-
-
Carchon, G.J.1
-
6
-
-
2442505703
-
Application of Au-Sn Eutectic Bonding in Hermetic RF MEMS Wafer Level Packaging
-
Atlanta, Ga, March
-
Kim, W., et al, "Application of Au-Sn Eutectic Bonding in Hermetic RF MEMS Wafer Level Packaging," IEEE 9th Intl. Symp. Adv. Pack. Matls., Atlanta, Ga, March 2004, pp. 215-219.
-
(2004)
IEEE 9th Intl. Symp. Adv. Pack. Matls
, pp. 215-219
-
-
Kim, W.1
-
7
-
-
24644441047
-
A Low Temperature, Hermetic Wafer Level Packaging Method for RF MEMS Switch
-
Orlando, FL
-
Kim, W., et al., "A Low Temperature, Hermetic Wafer Level Packaging Method for RF MEMS Switch," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1103-1108.
-
(2005)
IEEE 2005 ECTC
, pp. 1103-1108
-
-
Kim, W.1
-
8
-
-
0036120530
-
Investigation of the Hermeticity of BCB-Sealed Cavities for Housing (RF-)MEMS Devices
-
Las Vegas, NV, Jan
-
Jourdain, A., et al., "Investigation of the Hermeticity of BCB-Sealed Cavities for Housing (RF-)MEMS Devices," IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS, Las Vegas, NV, Jan 2002, pp. 677-680
-
(2002)
IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS
, pp. 677-680
-
-
Jourdain, A.1
-
10
-
-
0033718159
-
The Indent Reflow Sealing (IRS) Technique - A Method for the Fabrication of Sealed Cavities for MEMS Devices
-
Tilmans, H. A. C., et al., "The Indent Reflow Sealing (IRS) Technique - A Method for the Fabrication of Sealed Cavities for MEMS Devices," IEEE JMEMS, Vol. 9, No. 2, (2000), pp. 206-217.
-
(2000)
IEEE JMEMS
, vol.9
, Issue.2
, pp. 206-217
-
-
Tilmans, H.A.C.1
-
11
-
-
48149107388
-
RF MEMS Switch up to 20GHz with Wafer Level Packaging
-
Tokyo, Japan, June
-
st INSS 2004, Tokyo, Japan, June 2004.
-
(2004)
st INSS 2004
-
-
Sano, K.1
-
13
-
-
0036118192
-
A Novel Low-Loss Wafer-Level Packaging of the RF-MEMS Devices
-
Las Vegas, NV, Jan
-
Park, Y.-K., et al., "A Novel Low-Loss Wafer-Level Packaging of the RF-MEMS Devices," IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS, Las Vegas, NV, Jan 2002, pp. 681-684.
-
(2002)
IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS
, pp. 681-684
-
-
Park, Y.-K.1
-
14
-
-
84897565015
-
RF MEMS Switch with Wafer Level Package Utilizing Frit Glass Bonding
-
Milan, Italy, Oct
-
nd Eur. MicroWave Conf, Milan, Italy, Oct 2002, pp. 1-3.
-
(2002)
nd Eur. MicroWave Conf
, pp. 1-3
-
-
Fujii, M.1
-
15
-
-
0036906121
-
Fabrication of Wafer-Level Thermocompression Bonds
-
December
-
Tsau, C. H., Spearing, S. M., and Schmidt, M. A., "Fabrication of Wafer-Level Thermocompression Bonds," J. MEMS, Vol. 11, No. 6, December 2002, pp. 641-647.
-
(2002)
J. MEMS
, vol.11
, Issue.6
, pp. 641-647
-
-
Tsau, C.H.1
Spearing, S.M.2
Schmidt, M.A.3
-
16
-
-
24644475781
-
A Wafer-Level Packaging Appraoch for MEMS & Related Microsystems using Selective Laser-Assisted Bonding (LAB)
-
Orlando, FL
-
Mohan, A., et al., "A Wafer-Level Packaging Appraoch for MEMS & Related Microsystems using Selective Laser-Assisted Bonding (LAB)," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1099-1102.
-
(2005)
IEEE 2005 ECTC
, pp. 1099-1102
-
-
Mohan, A.1
-
17
-
-
0036772724
-
Vacuum Packaging Technology Using Localized Aluminum/Silicon-to-Glass Bonding
-
Cheng, Y.-T., et al., "Vacuum Packaging Technology Using Localized Aluminum/Silicon-to-Glass Bonding," IEEE JMEMS, Vol. 11, No. 5, (2002), pp. 556-565.
-
(2002)
IEEE JMEMS
, vol.11
, Issue.5
, pp. 556-565
-
-
Cheng, Y.-T.1
-
18
-
-
0032164259
-
Microelectromechanical Filters for Signal Processing
-
September
-
Lin, L., Howe, R. T., and Pisano, A. P., "Microelectromechanical Filters for Signal Processing," JMEMS, Vol. 7, September 1998, pp. 286-294.
-
(1998)
JMEMS
, vol.7
, pp. 286-294
-
-
Lin, L.1
Howe, R.T.2
Pisano, A.P.3
-
19
-
-
0142165226
-
Single Wafer Encapsulation of MEMS Devices
-
Candler, R. N., et al., "Single Wafer Encapsulation of MEMS Devices," IEEE Trans-Advanced Packaging, Vol. 26, No. 3, (2003), pp. 227-232.
-
(2003)
IEEE Trans-Advanced Packaging
, vol.26
, Issue.3
, pp. 227-232
-
-
Candler, R.N.1
-
20
-
-
34948849326
-
Wafer Level Micropackaging for RF MEMS Switches
-
San Francisco, CA, 17-22 July
-
Forehand, D. I., and Goldsmith, C. L., "Wafer Level Micropackaging for RF MEMS Switches," Proc. ASME IPACK2005, San Francisco, CA, 17-22 July 2005, pp. 1-5.
-
(2005)
Proc. ASME IPACK2005
, pp. 1-5
-
-
Forehand, D.I.1
Goldsmith, C.L.2
-
21
-
-
1942436715
-
A Low-Temperature Thin-Film Electroplated Metal Vacuum Package
-
Stark, B. H., and Najafi, K., "A Low-Temperature Thin-Film Electroplated Metal Vacuum Package," IEEE JMEMS, Vol. 13, No. 2, (2004), pp. 147-157.
-
(2004)
IEEE JMEMS
, vol.13
, Issue.2
, pp. 147-157
-
-
Stark, B.H.1
Najafi, K.2
-
22
-
-
24644445251
-
Optimized Micro-Via Technology for High Density and High Frequency (>40GHz) Hermetic Through-Wafer Connections in Silicon Substrates
-
Orlando, FL
-
Hauffe, R., et al., "Optimized Micro-Via Technology for High Density and High Frequency (>40GHz) Hermetic Through-Wafer Connections in Silicon Substrates," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 324-330.
-
(2005)
IEEE 2005 ECTC
, pp. 324-330
-
-
Hauffe, R.1
-
23
-
-
24644459878
-
A Vertical Wafer Level Packaging Using Through Hole Filled Via Interconnect by Lift Off Polymer Method for MEMS and 3D Stacking Applications
-
Orlando, FL
-
Premachandran, C. S., et al, "A Vertical Wafer Level Packaging Using Through Hole Filled Via Interconnect by Lift Off Polymer Method for MEMS and 3D Stacking Applications," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1094-1098.
-
(2005)
IEEE 2005 ECTC
, pp. 1094-1098
-
-
Premachandran, C.S.1
-
24
-
-
24644433947
-
3D Stacked Flip Chip Packaging with Through Silicon Vias and Copper Plating or Conductive Adhesive Filling
-
Orlando, FL
-
Lee, S. W. R., et al, "3D Stacked Flip Chip Packaging with Through Silicon Vias and Copper Plating or Conductive Adhesive Filling," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 795-801.
-
(2005)
IEEE 2005 ECTC
, pp. 795-801
-
-
Lee, S.W.R.1
-
26
-
-
0142258267
-
Chip-Level Vacuum Packaging of Micromachines Using NanoGetters
-
Sparks, D., et al., "Chip-Level Vacuum Packaging of Micromachines Using NanoGetters," IEEE Trans-Advnaced Packaging, Vol. 26, No. 3, (2003), pp. 277-282.
-
(2003)
IEEE Trans-Advnaced Packaging
, vol.26
, Issue.3
, pp. 277-282
-
-
Sparks, D.1
-
27
-
-
24644441265
-
Wafer-Level Vacuum packaging of MEMS Sensors
-
Orlando, FL
-
Marinis, T. F., et al., "Wafer-Level Vacuum packaging of MEMS Sensors," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1081-1088.
-
(2005)
IEEE 2005 ECTC
, pp. 1081-1088
-
-
Marinis, T.F.1
-
28
-
-
0043092466
-
High Frequency Parasitic Effects for On-Wafer Packaging of RF MEMS Switches
-
Philadelphia, PA
-
Margomenos, A., et al., "High Frequency Parasitic Effects for On-Wafer Packaging of RF MEMS Switches," IEEE MTT-S, Philadelphia, PA, 2003, pp. 1931-1934.
-
(2003)
IEEE MTT-S
, pp. 1931-1934
-
-
Margomenos, A.1
-
29
-
-
0037674319
-
Design and Electrical Characterization of a Novel Wafer Level Package for RF MEMS Applications
-
New Orleans, LA
-
Rotaru, M. D., et al., "Design and Electrical Characterization of a Novel Wafer Level Package for RF MEMS Applications," IEEE Elec. Comp. and Tech. Conf., 2003, New Orleans, LA, 2003, pp. 1626-1630.
-
(2003)
IEEE Elec. Comp. and Tech. Conf
, pp. 1626-1630
-
-
Rotaru, M.D.1
-
30
-
-
18844451528
-
DC-50 GHz Low-Loss Wafer-Scale Package for RF MEMS
-
Amsterdam, The Netherlands
-
Min, B.-W., et al., "DC-50 GHz Low-Loss Wafer-Scale Package for RF MEMS," 34th Eur. Microwave Conf., Amsterdam, The Netherlands, 2004, pp. 1289-1290.
-
(2004)
34th Eur. Microwave Conf
, pp. 1289-1290
-
-
Min, B.-W.1
-
31
-
-
24644497771
-
Modeling-based Design Optimization of Wafer-Level and Chip-Scale Packaging for RF-MEMS Devices
-
Orlando, FL
-
Kelley, M., et al., "Modeling-based Design Optimization of Wafer-Level and Chip-Scale Packaging for RF-MEMS Devices," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1814-1818.
-
(2005)
IEEE 2005 ECTC
, pp. 1814-1818
-
-
Kelley, M.1
|