메뉴 건너뛰기




Volumn , Issue , 2007, Pages 278-285

Challenges and solutions for cost-effective RF-MEMS packaging

Author keywords

[No Author keywords available]

Indexed keywords

COST CONSTRAINTS; ELECTRONICS MANUFACTURING; ENGINEERING FIELDS; FINAL PRODUCTS; FUNCTIONAL INTEGRATION; FUTURE RESEARCH; MEMS DEVICES; MICRO-ELECTRO MECHANICAL SYSTEMS; MOBILE WIRELESS TERMINALS; NUMBER OF COMPONENTS; ON CURRENTS; RF PERFORMANCE; RF-MEMS; SEMICONDUCTOR INDUSTRIES; TECHNICAL BENEFITS;

EID: 48149085897     PISSN: 10898190     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEMT.2007.4417077     Document Type: Conference Paper
Times cited : (7)

References (31)
  • 2
    • 0038441780 scopus 로고    scopus 로고
    • Performance and Reliability of post-CMOS metal/oxide MEMS for RF Application
    • Hill, M., et al., "Performance and Reliability of post-CMOS metal/oxide MEMS for RF Application," J. Micromech. Microeng., Vol. 13, (2003), pp. S131-S138.
    • (2003) J. Micromech. Microeng , vol.13
    • Hill, M.1
  • 4
    • 84949937090 scopus 로고    scopus 로고
    • Fundamental Requirements on MEMS Packaging and Reliability
    • Stone Mountain, Ga, March
    • Persson, K., et al, "Fundamental Requirements on MEMS Packaging and Reliability," Proc. Intl. Conf. Adv. Pack And Sys., Stone Mountain, Ga, March 2002, pp. 1-7.
    • (2002) Proc. Intl. Conf. Adv. Pack And Sys , pp. 1-7
    • Persson, K.1
  • 5
    • 34548178008 scopus 로고    scopus 로고
    • Integration of 0/1-Level Packaged RF-MEMS Devices on MCM-D at Millimeter-Wave Frequencies
    • Carchon, G. J., et al., "Integration of 0/1-Level Packaged RF-MEMS Devices on MCM-D at Millimeter-Wave Frequencies," IEEE Trans-Advanced Packaging, Vol. 30, No. 3, (2007), pp. 369-376.
    • (2007) IEEE Trans-Advanced Packaging , vol.30 , Issue.3 , pp. 369-376
    • Carchon, G.J.1
  • 6
    • 2442505703 scopus 로고    scopus 로고
    • Application of Au-Sn Eutectic Bonding in Hermetic RF MEMS Wafer Level Packaging
    • Atlanta, Ga, March
    • Kim, W., et al, "Application of Au-Sn Eutectic Bonding in Hermetic RF MEMS Wafer Level Packaging," IEEE 9th Intl. Symp. Adv. Pack. Matls., Atlanta, Ga, March 2004, pp. 215-219.
    • (2004) IEEE 9th Intl. Symp. Adv. Pack. Matls , pp. 215-219
    • Kim, W.1
  • 7
    • 24644441047 scopus 로고    scopus 로고
    • A Low Temperature, Hermetic Wafer Level Packaging Method for RF MEMS Switch
    • Orlando, FL
    • Kim, W., et al., "A Low Temperature, Hermetic Wafer Level Packaging Method for RF MEMS Switch," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1103-1108.
    • (2005) IEEE 2005 ECTC , pp. 1103-1108
    • Kim, W.1
  • 8
    • 0036120530 scopus 로고    scopus 로고
    • Investigation of the Hermeticity of BCB-Sealed Cavities for Housing (RF-)MEMS Devices
    • Las Vegas, NV, Jan
    • Jourdain, A., et al., "Investigation of the Hermeticity of BCB-Sealed Cavities for Housing (RF-)MEMS Devices," IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS, Las Vegas, NV, Jan 2002, pp. 677-680
    • (2002) IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS , pp. 677-680
    • Jourdain, A.1
  • 10
    • 0033718159 scopus 로고    scopus 로고
    • The Indent Reflow Sealing (IRS) Technique - A Method for the Fabrication of Sealed Cavities for MEMS Devices
    • Tilmans, H. A. C., et al., "The Indent Reflow Sealing (IRS) Technique - A Method for the Fabrication of Sealed Cavities for MEMS Devices," IEEE JMEMS, Vol. 9, No. 2, (2000), pp. 206-217.
    • (2000) IEEE JMEMS , vol.9 , Issue.2 , pp. 206-217
    • Tilmans, H.A.C.1
  • 11
    • 48149107388 scopus 로고    scopus 로고
    • RF MEMS Switch up to 20GHz with Wafer Level Packaging
    • Tokyo, Japan, June
    • st INSS 2004, Tokyo, Japan, June 2004.
    • (2004) st INSS 2004
    • Sano, K.1
  • 13
    • 0036118192 scopus 로고    scopus 로고
    • A Novel Low-Loss Wafer-Level Packaging of the RF-MEMS Devices
    • Las Vegas, NV, Jan
    • Park, Y.-K., et al., "A Novel Low-Loss Wafer-Level Packaging of the RF-MEMS Devices," IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS, Las Vegas, NV, Jan 2002, pp. 681-684.
    • (2002) IEEE MEMS 2002, The Fifteenth Intl. Conf. on MEMS , pp. 681-684
    • Park, Y.-K.1
  • 14
    • 84897565015 scopus 로고    scopus 로고
    • RF MEMS Switch with Wafer Level Package Utilizing Frit Glass Bonding
    • Milan, Italy, Oct
    • nd Eur. MicroWave Conf, Milan, Italy, Oct 2002, pp. 1-3.
    • (2002) nd Eur. MicroWave Conf , pp. 1-3
    • Fujii, M.1
  • 15
    • 0036906121 scopus 로고    scopus 로고
    • Fabrication of Wafer-Level Thermocompression Bonds
    • December
    • Tsau, C. H., Spearing, S. M., and Schmidt, M. A., "Fabrication of Wafer-Level Thermocompression Bonds," J. MEMS, Vol. 11, No. 6, December 2002, pp. 641-647.
    • (2002) J. MEMS , vol.11 , Issue.6 , pp. 641-647
    • Tsau, C.H.1    Spearing, S.M.2    Schmidt, M.A.3
  • 16
    • 24644475781 scopus 로고    scopus 로고
    • A Wafer-Level Packaging Appraoch for MEMS & Related Microsystems using Selective Laser-Assisted Bonding (LAB)
    • Orlando, FL
    • Mohan, A., et al., "A Wafer-Level Packaging Appraoch for MEMS & Related Microsystems using Selective Laser-Assisted Bonding (LAB)," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1099-1102.
    • (2005) IEEE 2005 ECTC , pp. 1099-1102
    • Mohan, A.1
  • 17
    • 0036772724 scopus 로고    scopus 로고
    • Vacuum Packaging Technology Using Localized Aluminum/Silicon-to-Glass Bonding
    • Cheng, Y.-T., et al., "Vacuum Packaging Technology Using Localized Aluminum/Silicon-to-Glass Bonding," IEEE JMEMS, Vol. 11, No. 5, (2002), pp. 556-565.
    • (2002) IEEE JMEMS , vol.11 , Issue.5 , pp. 556-565
    • Cheng, Y.-T.1
  • 18
    • 0032164259 scopus 로고    scopus 로고
    • Microelectromechanical Filters for Signal Processing
    • September
    • Lin, L., Howe, R. T., and Pisano, A. P., "Microelectromechanical Filters for Signal Processing," JMEMS, Vol. 7, September 1998, pp. 286-294.
    • (1998) JMEMS , vol.7 , pp. 286-294
    • Lin, L.1    Howe, R.T.2    Pisano, A.P.3
  • 19
    • 0142165226 scopus 로고    scopus 로고
    • Single Wafer Encapsulation of MEMS Devices
    • Candler, R. N., et al., "Single Wafer Encapsulation of MEMS Devices," IEEE Trans-Advanced Packaging, Vol. 26, No. 3, (2003), pp. 227-232.
    • (2003) IEEE Trans-Advanced Packaging , vol.26 , Issue.3 , pp. 227-232
    • Candler, R.N.1
  • 20
    • 34948849326 scopus 로고    scopus 로고
    • Wafer Level Micropackaging for RF MEMS Switches
    • San Francisco, CA, 17-22 July
    • Forehand, D. I., and Goldsmith, C. L., "Wafer Level Micropackaging for RF MEMS Switches," Proc. ASME IPACK2005, San Francisco, CA, 17-22 July 2005, pp. 1-5.
    • (2005) Proc. ASME IPACK2005 , pp. 1-5
    • Forehand, D.I.1    Goldsmith, C.L.2
  • 21
    • 1942436715 scopus 로고    scopus 로고
    • A Low-Temperature Thin-Film Electroplated Metal Vacuum Package
    • Stark, B. H., and Najafi, K., "A Low-Temperature Thin-Film Electroplated Metal Vacuum Package," IEEE JMEMS, Vol. 13, No. 2, (2004), pp. 147-157.
    • (2004) IEEE JMEMS , vol.13 , Issue.2 , pp. 147-157
    • Stark, B.H.1    Najafi, K.2
  • 22
    • 24644445251 scopus 로고    scopus 로고
    • Optimized Micro-Via Technology for High Density and High Frequency (>40GHz) Hermetic Through-Wafer Connections in Silicon Substrates
    • Orlando, FL
    • Hauffe, R., et al., "Optimized Micro-Via Technology for High Density and High Frequency (>40GHz) Hermetic Through-Wafer Connections in Silicon Substrates," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 324-330.
    • (2005) IEEE 2005 ECTC , pp. 324-330
    • Hauffe, R.1
  • 23
    • 24644459878 scopus 로고    scopus 로고
    • A Vertical Wafer Level Packaging Using Through Hole Filled Via Interconnect by Lift Off Polymer Method for MEMS and 3D Stacking Applications
    • Orlando, FL
    • Premachandran, C. S., et al, "A Vertical Wafer Level Packaging Using Through Hole Filled Via Interconnect by Lift Off Polymer Method for MEMS and 3D Stacking Applications," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1094-1098.
    • (2005) IEEE 2005 ECTC , pp. 1094-1098
    • Premachandran, C.S.1
  • 24
    • 24644433947 scopus 로고    scopus 로고
    • 3D Stacked Flip Chip Packaging with Through Silicon Vias and Copper Plating or Conductive Adhesive Filling
    • Orlando, FL
    • Lee, S. W. R., et al, "3D Stacked Flip Chip Packaging with Through Silicon Vias and Copper Plating or Conductive Adhesive Filling," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 795-801.
    • (2005) IEEE 2005 ECTC , pp. 795-801
    • Lee, S.W.R.1
  • 26
    • 0142258267 scopus 로고    scopus 로고
    • Chip-Level Vacuum Packaging of Micromachines Using NanoGetters
    • Sparks, D., et al., "Chip-Level Vacuum Packaging of Micromachines Using NanoGetters," IEEE Trans-Advnaced Packaging, Vol. 26, No. 3, (2003), pp. 277-282.
    • (2003) IEEE Trans-Advnaced Packaging , vol.26 , Issue.3 , pp. 277-282
    • Sparks, D.1
  • 27
    • 24644441265 scopus 로고    scopus 로고
    • Wafer-Level Vacuum packaging of MEMS Sensors
    • Orlando, FL
    • Marinis, T. F., et al., "Wafer-Level Vacuum packaging of MEMS Sensors," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1081-1088.
    • (2005) IEEE 2005 ECTC , pp. 1081-1088
    • Marinis, T.F.1
  • 28
    • 0043092466 scopus 로고    scopus 로고
    • High Frequency Parasitic Effects for On-Wafer Packaging of RF MEMS Switches
    • Philadelphia, PA
    • Margomenos, A., et al., "High Frequency Parasitic Effects for On-Wafer Packaging of RF MEMS Switches," IEEE MTT-S, Philadelphia, PA, 2003, pp. 1931-1934.
    • (2003) IEEE MTT-S , pp. 1931-1934
    • Margomenos, A.1
  • 29
    • 0037674319 scopus 로고    scopus 로고
    • Design and Electrical Characterization of a Novel Wafer Level Package for RF MEMS Applications
    • New Orleans, LA
    • Rotaru, M. D., et al., "Design and Electrical Characterization of a Novel Wafer Level Package for RF MEMS Applications," IEEE Elec. Comp. and Tech. Conf., 2003, New Orleans, LA, 2003, pp. 1626-1630.
    • (2003) IEEE Elec. Comp. and Tech. Conf , pp. 1626-1630
    • Rotaru, M.D.1
  • 30
    • 18844451528 scopus 로고    scopus 로고
    • DC-50 GHz Low-Loss Wafer-Scale Package for RF MEMS
    • Amsterdam, The Netherlands
    • Min, B.-W., et al., "DC-50 GHz Low-Loss Wafer-Scale Package for RF MEMS," 34th Eur. Microwave Conf., Amsterdam, The Netherlands, 2004, pp. 1289-1290.
    • (2004) 34th Eur. Microwave Conf , pp. 1289-1290
    • Min, B.-W.1
  • 31
    • 24644497771 scopus 로고    scopus 로고
    • Modeling-based Design Optimization of Wafer-Level and Chip-Scale Packaging for RF-MEMS Devices
    • Orlando, FL
    • Kelley, M., et al., "Modeling-based Design Optimization of Wafer-Level and Chip-Scale Packaging for RF-MEMS Devices," IEEE 2005 ECTC, Orlando, FL, 2005, pp. 1814-1818.
    • (2005) IEEE 2005 ECTC , pp. 1814-1818
    • Kelley, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.