Correlation between the oxygen content and the morphology of AlN films grown by r.f. magnetron sputtering

Journal of Crystal Growth

Volumn 310, Issue 16, 2008, Pages 3890-3895

  Brien, V ^a   Pigeat, P ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

Author keywords

A1. Crystal morphology; A1. Defects; A3. Physical vapor deposition processes; B1. Nitrides; B2. Semiconducting III V materials

Indexed keywords

ALUMINUM; CRYSTALLOGRAPHY; MAGNETRON SPUTTERING; MAGNETRONS; MINERALOGY; MORPHOLOGY; PRESSURE; SPUTTER DEPOSITION; THICK FILMS; VAPOR DEPOSITION;

ALN FILMS; ALN THIN FILMS; CRYSTALLINE MORPHOLOGIES; GRAIN SIZES; HIGH ENERGIES; HIGH PRESSURE (HP); LOW ENERGIES; LOW OXYGEN; LOW POWERS; OXYGEN CONTENTS; PROCESS PARAMETERS; R. F. MAGNETRON SPUTTERING; ROOM-TEMPERATURE (RT);

OXYGEN;

EID: 48049091360     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2008.06.021     Document Type: Article

References (40)

1. Tjong S.C., and Chen H. Mater. Sci. Eng. R 45 1-2 (2004) 1a
2. Sun C.Q. Prog. Solid State Chem. 35 1 (2007) 1
3. Pearton S.J., Abernathy C.R., Ren F., Shul R.J., Kilcoyne S.P., Hagerott-Crawford M., Zolper J.C., Wilson R.G., Schwartz R.G., and Zavada J.M. Mater. Sci. Eng. B 38 1-2 (1996) 138
4. Jiang H.X., and Lin J.Y. Crit. Rev. Solid State Mater. Sci. 28 2 (2003) 131
5. Weingärtner R., Erlenbach O., Winnacker A., Welte A., Brauer I., Mendel H., Strunk H.P., Ribeiro C.T.M., and Zanatta A.R. Opt. Mater. 28 6-7 (2006) 790
6. Lim J.-W., Takayama W., Zhu Y.F., Bae J.W., Wang J.F., Ji S.Y., Mimura K., Yoo J.H., and Isshiki M. Curr. Appl. Phys. 7 (2007) 236
7. Aldabergenova S.B., Albrecht M., Strunk H.P., Viner J., Taylor P.C., and Andreev A.A. Mater. Sci. Eng. B 81 1-3 (2001) 144
8. Gurumurugan K. Appl. Phys. Lett. 74 20 (1999) 3008
9. Zanatta A.R. Appl. Phys. Lett. 82 9 (2003) 1395
10. Dimitrova V.I., and Van Pattern P.G. Appl. Surf. Sci. 175/176 (2001) 480
11. Caldwell M.L., Patten P.G., Kordesh M.E., and Richardson H.H. MRS Internet J. Nitride Semicond. Res. 6 (2001) 13
12. Slack G.A., Schowalter L.J., Morelli D., and Freitas Jr. J.A. J. Crystal Growth 246 (2002) 287
13. Oliveira J.C., Cavaleiro A., Vieira M.T., Bigot L., Garapon C., Jacquier B., and Mugnier J. Opt. Mater. 24 (2003) 321
14. Slack G.A. J. Phys. Chem. Solids 34 (1973) 321
15. Bickerman M., Epelbaum B.M., and Winnacker A. Phys. Status Solidi 7 (2003) 1993
16. Yougman R.A., and Harris J.H. J. Am. Ceram. Soc. 73 11 (1990) 3228
17. Kazan M., Bufflé B., Zgheib Ch., and Masri P. J. Appl. Phys. 98 (2005) 103529-103531
18. Kazan M., Bufflé B., Zgheib Ch., and Masri P. Diamond Relat. Mater. 15 (2006) 1525
19. Dehuang W., and Liang G. Thin Solid Films 198 (1991) 207
20. Vergara L., Clement M., Iborra E., Sanz-Hervas A., Garcia Lopez J., Morilla Y., Sandragor J., and Respaldiza M.A. Diam. Rel. Mater. 13 (2004) 839
21. Elmazria O., Assouar M.B., Renard P., and Alnot P. Phys. Status Solidi A 196 2 (2003) 416
22. Francis R.W., and Worell W.L. J. Electrochem. Soc. 123 (1976) 430
23. Brien V., and Pigeat P. J. Crystal Growth 299 (2007) 189
24. Easwarakhantan T., Assouar M.B., Pigeat P., and Alnot P. J. Appl. Phys. 98 073531-1073 (2005) 531
25. Choi J.H., Lee J.Y., and Kim J.H. Thin Solid Films 384 (2001) 166
26. van der Drift A. Philips. Res. Rep. 22 (1967) 267
27. Harris J.H., Yougman R.A., and Teller R.G. J. Mater. Res. 5 8 (1990) 1763
28. Westwood A.D., and Notis M.R. J. Am. Ceram. Soc. 74 6 (1991) 1226
29. Berger A. J. Am. Ceram. Soc. 74 5 (1991) 1148
30. Westwood A.D., Youngman R.A., McCartney M.R., Cormack A.N., and Notis M.R. J. Mater. Res. 10 5 part I (1995) 1270
31. Westwood A.D., Youngman R.A., McCartney M.R., Cormack A.N., and Notis M.R. J. Mater. Res. 10 5 part II (1995) 1287
32. Westwood A.D., Youngman R.A., McCartney M.R., Cormack A.N., and Notis M.R. J. Mater. Res. 10 5 part III (1995) 2573
33. Van Tendeloo G., Faber K.T., and Thomas G. J. Mater. Sci. 18 (1983) 525
34. Sternitzke M., and Müller G. J. Am. Ceram. Soc. 77 3 (1994) 737
35. Solmon H., Robinson D., and Dieckmann R. J. Am. Ceram. Soc. 11 (1994) 2841
36. Xu X.H., Wu H.S., Zhang C.J., and Jin Z.H. Thin Solid Films 388 (2001) 62
37. Williams D.B., and Carter C.B. Transmission Electron Microscopy, A Textbook for Materials Science (1996), Plenum Press, New York pp. 387
38. Liu W.-J., Wu S.-J., Chen C.-M., Lai Y.-C., and Chuang C.-H. J. Crystal Growth 276 (2005) 525
39. Ianno N.J., Enshaby H., and Dillon R.O. Surf. Coat. Technol. 155 (2002) 130
40. Van Richthofen A., and Domnick R. Thin Solid Films 283 (1996) 37