Microstructures diagram of magnetron sputtered AlN deposits: Amorphous and nanostructured films

Journal of Crystal Growth

Volumn 299, Issue 1, 2007, Pages 189-194

  Brien, V ^a   Pigeat, P ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

A1. Crystal morphology; A1. Nanostructures; A3. Chemical vapor deposition processes; B1. Aluminium nitride; B2. Piezoelectric materials

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PIEZOELECTRIC MATERIALS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CRYSTAL MORPHOLOGY; PLASMA WORKING PRESSURE; RADIO FREQUENCY MAGNETRON REACTIVE SPUTTERING DEPOSITION;

ALUMINUM NITRIDE;

EID: 33846625228     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.10.238     Document Type: Article

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