PVT growth of bulk AlN crystals with low oxygen contamination

Physica Status Solidi C: Conferences

Volumn , Issue 7, 2003, Pages 1993-1996

  Bickermann, M ^a   Epelbaum, B M ^a,b   Winnacker, A ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b SICRYSTAL AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE (ALN); C-AXIS DIRECTION; MATERIAL TRANSPORT; NITROGEN ATMOSPHERES; OXYGEN CONTAMINATION; PHYSICAL VAPOR TRANSPORT; RECONDENSATION; STRUCTURAL QUALITIES;

CRYSTAL IMPURITIES; NITRIDES; OXYGEN;

ALUMINUM NITRIDE;

EID: 84875084279     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200303280     Document Type: Conference Paper

References (18)

1. J. C. Rojo, G. A. Slack, K. Morgan, B. Raghothamachar, M. Dudley, and L. J. Schowalter, J. Cryst. Growth 231, 317 (2001).
2. R. Gaska, C. Chen, J. Yang, E. Kukostis, A. Khan, G. Tamulaitis, I. Yilmaz, M. S. Shur, J. C. Rojo, and L. J. Schowalter, Appl. Phys. Lett. 81, 4658 (2002).
3. G. A. Slack, L. J. Schowalter, D. Morelli, and J. A. Freitas, Jr., J. Cryst. Growth 246, 287 (2002).
4. G. A. Slack, R. A. Tanzilli, R. O. Pohl, and J. W. Vandersande, J. Phys. Chem. Solids 48, 641 (1997).
5. G. A. Slack and T. F. McNelly, J. Cryst. Growth 34, 287 (1976);
6. J. Cryst. Growth 42, 560 (1977).
7. M. M. Faktor and I. Garrett, Growth of Crystals from the Vapour (Chapman and Hall, London, 1974).
8. M. Schieber, I. Beinglass, G. Dishon, and A. Holzer, in: Crystal Growth and Materials (1976), edited by E. Kaldis and H. J. Scheel (North Holland, Amsterdam, 1977), p. 280.
9. T. Perlin, A. Polian, and T. Suski, Phys. Rev. B 47, 2874 (1993).
10. L. E. McNeil, M. Grimsditch, and R. H. French, J. Am. Ceram. Soc. 76, 1132 (1993).
11. K. Kornitzer, W. Limmer, K. Thonke, R. Sauer, D. G. Ebling, L. Steinke, and K. W. Benz, J. Cryst. Growth 201/202, 441 (1999).
12. A. Cros, H. Angerer, R. Handschuh, O. Ambacher, and M. Stutzmann, MRS Internet J. Nitride Semicond. Res. 2, 43 (1997).
13. J. M. Hayes, M. Kuball, Y. Shi, and J. H. Edgar, Jpn. J. Appl. Phys. 39, L 710 (2000).
14. L. Bergman, M. Dutta, C. Balkas, R. F. Davis, J. A. Christman, D. Alexson, and R. J. Nemanich, J. Appl. Phys. 85, 3535 (1999).
15. M. Morita, K. Tsubouchi, and N. Mikoshiba, Jpn. J. Appl. Phys. 21, L 1102 (1982).
16. T. Mattila and R. M. Nieminen, Phys. Rev. B 54, 16676 (1996).
17. T. L. Tansley and R. J. Egan, Phys. Rev. B 45, 10942 (1992).
18. J. Pastrnak and L. Roskovcova, phys. stat. sol. 26, 591 (1968).