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Volumn 155, Issue 2-3, 2002, Pages 130-135
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Aluminum oxynitride coatings for oxidation resistance of epoxy films
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Author keywords
Aluminum; Atomic force microscopy; Nitrides; Oxides; Reactive sputtering; X ray diffraction
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Indexed keywords
ALUMINUM NITRIDE;
ATOMIC FORCE MICROSCOPY;
ELECTRON CYCLOTRON RESONANCE;
ELECTRON MICROSCOPY;
OXIDATION RESISTANCE;
SILICON;
SPUTTER DEPOSITION;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
EPOXY FILMS;
PROTECTIVE COATINGS;
COATING;
CORROSION RESISTANCE;
EPOXY PAINT SYSTEM;
MICROSCOPY;
OXIDATION;
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EID: 0037124993
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00051-8 Document Type: Article |
Times cited : (21)
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References (24)
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