메뉴 건너뛰기




Volumn 155, Issue 2-3, 2002, Pages 130-135

Aluminum oxynitride coatings for oxidation resistance of epoxy films

Author keywords

Aluminum; Atomic force microscopy; Nitrides; Oxides; Reactive sputtering; X ray diffraction

Indexed keywords

ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; ELECTRON CYCLOTRON RESONANCE; ELECTRON MICROSCOPY; OXIDATION RESISTANCE; SILICON; SPUTTER DEPOSITION; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

EID: 0037124993     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00051-8     Document Type: Article
Times cited : (21)

References (24)
  • 18
    • 0009821064 scopus 로고    scopus 로고
    • Masters Thesis University of Nebraska-Lincoln
    • (2000)
    • Enshasy, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.