Oxygen behavior in aluminum nitride

Journal of Applied Physics

Volumn 98, Issue 10, 2005, Pages

  Kazan, M ^a   Ruffl B ^a   Zgheib, Ch ^a   Masri, P ^a  

^a UNIVERSITÉ MONTPELLIER 2   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DISPERSION THEORY; LONGITUDINAL MODE FREQUENCIES; REFELECTIVITY;

ALUMINUM NITRIDE; CONTAMINATION; LIGHT POLARIZATION; POLYCRYSTALLINE MATERIALS;

OXYGEN;

EID: 28644437770     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2137461     Document Type: Article

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