Galvanic corrosion during processing of polysilicon microelectromechanical systems

Journal of the Electrochemical Society

Volumn 153, Issue 7, 2006, Pages

  Huh, M ^a   Yu, Y ^a   Kahn, H ^a   Payer, J H ^a,b   Heuer, A H ^a  

^a Case Western Reserve University   (United States)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; ELECTROCHEMICAL CORROSION; GALVANIZING; GRAIN BOUNDARIES; METALLIZING; POLYSILICON; SOLUTIONS;

DOPANTS; GALVANIC CORROSION; HYDROFLUORIC ACID (HF); MICROSTRUCTURAL MORPHOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 33744816217     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2199139     Document Type: Article

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