The effects of post-deposition processes on polysilicon Young's modulus

Journal of Micromechanics and Microengineering

Volumn 8, Issue 4, 1998, Pages 330-337

  Lee, Sangwoo ^a   Cho, Changho ^a   Kim, Jongpal ^a   Park, Sangjun ^a   Yi, Sangwoo ^a   Kim, Jongjun ^b   Cho, Dong Il Dan ^a  

^a Seoul National University   (South Korea)

^b Konkuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; PHOSPHORUS; SEMICONDUCTING SILICON COMPOUNDS;

PHOSPHOSILICATE GLASS; POLYSILICON FILMS;

SEMICONDUCTING FILMS;

EID: 0032291865     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/8/4/012     Document Type: Article

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