Thermo-mechanical evolution of multilayer thin films: Part II. Microstructure evolution in Au/Cr/Si microcantilevers

Thin Solid Films

Volumn 515, Issue 6, 2007, Pages 3224-3240

  Miller, David C ^a   Herrmann, Cari F ^a,b   Maier, Hans J ^c   George, Steven M ^b   Stoldt, Conrad R ^a   Gall, Ken ^d  

^a UCB 450   (United States)

^b UNIVERSITY OF COLORADO   (United States)

^c UNIVERSITY OF PADERBORN   (Germany)

^d Georgia Institute of Technology   (United States)

Author keywords

Diffusion; Microstructural evolution; Passivation coating; Thin metal films

Indexed keywords

CHROMIUM; CRYSTALLINE MATERIALS; DIFFUSION; GOLD; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; PASSIVATION; SEMICONDUCTING SILICON;

ALUMINA SURFACE COATINGS; GRAIN COARSENING; MICROCANTILEVERS; PASSIVATION COATING; SELF DIFFUSION; THIN METAL FILMS;

THIN FILMS;

EID: 33846348276     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.01.045     Document Type: Article

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