Design and performance of a microcantilever-based hydrogen sensor

Sensors and Actuators, B: Chemical

Volumn 88, Issue 2, 2003, Pages 120-131

  Baselt, D R ^a   Fruhberger, B ^a   Klaassen, E ^a,c   Cemalovic, S ^a   Britton Jr , C L ^b   Patel, S V ^a   Mlsna, T E ^a   McCorkle, D ^b   Warmack, B ^b  

^a Graviton Inc   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c INTEL CORPORATION   (United States)

Author keywords

Cantilever; Gas sensor; Hydrogen; MEMS; Palladium

Indexed keywords

CANTILEVER BEAMS; COATINGS; ENVIRONMENTAL IMPACT; HYDROGEN; MICROELECTROMECHANICAL DEVICES; ULTRAHIGH VACUUM;

HYDROGEN SENSORS;

CHEMICAL SENSORS;

EID: 0037437327     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(02)00315-5     Document Type: Article

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