Nano-sized surface modifications induced by the impact of slow highly charged ions - A first review

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 12-13, 2008, Pages 2729-2735

  Aumayr, F ^a   El Said, A S ^a   Meissl, W ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

CaF2; Highly charged ions; Ion surface interaction; Nanostructuring of surfaces

Indexed keywords

CHARGED PARTICLES; CRYSTALLINE MATERIALS; HEAVY IONS; IRRADIATION; NANOSTRUCTURED MATERIALS;

HIGHLY CHARGED IONS; ION-SURFACE INTERACTION; NANO-SIZED SURFACE MODIFICATIONS; NANOSTRUCTURING OF SURFACES;

SURFACE TREATMENT;

EID: 44649106954     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.106     Document Type: Article

References (56)

1. Fleischer R.L., Price P.B., and Walker R.M. J. Appl. Phys. 36 (1965) 3645
2. Dammak H., Dunlop A., Lesueur D., Brunelle A., Della-Negra S., and Le Beyec Y. Phys. Rev. Lett. 74 (1995) 1135
3. Schiewietz G., Luderer E., Xiao G., and Grande P.L. Nucl. Instr. and Meth. B 175 (2001) 1
4. Chadderton L.T. Radiat. Measure. 36 (2003) 13
5. Gnaser H. Low-Energy Ion Irradiation of Solid Surfaces Vol. 146 (1999), Springer, Berlin
6. Lesueur D., and Dunlop A. Radiat. Eff. Defect Sol. 126 (1993) 163
7. Toulemonde M., Dufour C., and Paumier E. Phys. Rev. B 46 (1992) 14362
8. Müller C., Benyagoub A., Lang M., Neumann R., Schwartz K., Toulemonde M., and Trautmann C. Nucl. Instr. and Meth. B 209 (2003) 175
9. Müller C., Cranney M., El-Said A.S., Ishikawa N., Iwase A., Lang M., and Neumann R. Nucl. Instr. and Meth. B 191 (2002) 246
10. Khalfaoui N., Rotaru C.C., Bouffard S., Toulemonde M., Stoquert J.P., Haas F., Trautmann C., Jensen J., and Dunlop A. Nucl. Instr. and Meth. B 240 (2005) 819
11. El-Said A.S., Cranney M., Ishikawa N., Iwase A., Neumann R., Schwartz K., Toulemonde M., and Trautmann C. Nucl. Instr. and Meth. B 218 (2004) 492
12. El-Said A.S., Neumann R., Schwartz K., and Trautmann C. Radiat. Eff. Defect Sol. 157 (2002) 649
13. Aumayr F., and Winter HP. Phil. Trans. Roy. Soc. (London) 362 (2004) 77
14. Hagstrum H.D. Phys. Rev. 96 (1954) 325
15. Hagstrum H.D. Phys. Rev. 96 (1954) 336
16. Arnau A., Aumayr F., Echenique P.M., Grether M., Heiland W., Limburg J., Morgenstern R., Roncin P., Schippers S., Schuch R., Stolterfoht N., Varga P., Zouros T.J.M., and Winter HP. Surf. Sci. Reports 27 (1997) 113
17. Neidhart T., Pichler F., Aumayr F., Winter HP., Schmid M., and Varga P. Phys. Rev. Lett. 74 (1995) 5280
18. Sporn M., Libiseller G., Neidhart T., Schmid M., Aumayr F., Winter HP., Varga P., Grether M., and Stolterfoht N. Phys. Rev. Lett. 79 (1997) 945
19. Kuroki K., Okabayashi N., Torii H., Komaki K., and Yamazaki Y. Appl. Phys. Lett. 81 (2002) 3561
20. Okabayashi N., Komaki K., and Yamazaki Y. Nucl. Instr. and Meth. B 232 (2005) 244
21. Hasselkamp D. In: Höhler G. (Ed). Particle Induced Electron Emission II (1992), Springer, Heidelberg 1
22. Schou J. Scanning Microsc. 2 (1988) 607
23. Rösler M., and Brauer W. In: Höhler G. (Ed). Particle Induced Electron Emission I (1991), Springer, Berlin
24. P. Sigmund, Fundamental Processes in Sputtering of Atoms and Molecules (SPUT 92), Mat. Fys. Medd., Vol. 43. Copenhagen, 1993, p. 2.
25. Winter HP., and Aumayr F. J. Phys. B: At. Mol. Opt. Phys. 32 (1999) R39
26. Winter HP., and Aumayr F. Euro. Phys. News 33 (2002) 215
27. Schneider D., Briere M.A., Clark M.W., McDonald J., Biersack J., and Siekhaus W. Surf. Sci. 294 (1993) 403
28. Schneider D.H., Briere M.A., McDonald J., and Biersack J. Radiat. Eff. Defect Solid 127 (1993) 113
29. Ruehlicke C., Briere M.A., and Schneider D.H. Nucl. Instr. and Meth. B 99 (1995) 528
30. Parks D.C., Stöckli M.P., Bell E.W., Ratliff L.P., Schmieder R.W., Serpa F.G., and Gillaspy J.D. Nucl. Instr. and Meth. B 134 (1998) 46
31. Parks D.C., Bastasz R., Schmieder R.W., and Stöckli M. J. Vac. Sci. Technol. B 13 (1995) 941
32. Hayderer G., Cernusca S., Schmid M., Varga P., Winter H., and Aumayr F. Phys. Scripta T92 (2000) 156
33. Gebeshuber I.C., Cernusca S., Aumayr F., and Winter HP. Int. J. Mass Spectrom. Ion Proc. 229 (2003) 27
34. Liu J., Neumann R., Trautmann C., and Müller C. Phys. Rev. B 64 (2001) 184115
35. Mochiji K., Yamamoto S., Shimizu H., Ohtani S., Seguchi T., and Kobayashi N. J. Appl. Phys. 82 (1997) 6037
36. Meguro T., Hida A., Koguchi Y., Miyamoto S., Yamamoto Y., Takai H., Maeda K., and Aoyagi Y. Nucl. Instr. and Meth. B 209 (2003) 170
37. Minniti R., Ratliff L.P., and Gillaspy J.D. Phys. Scripta T92 (2001) 22
38. Nakamura N., Terada M., Nakai Y., Kanai Y., Ohtani S., Komaki K., and Yamazaki Y. Nucl. Instr. and Meth. B 232 (2005) 261
39. Terada M., Nakamura N., Nakai Y., Kanai Y., Ohtani S., Komaki K., and Yamazaki Y. Nucl. Instr. and Meth. B 235 (2005) 452
40. El-Said A.S., Meissl W., Simon M.C., Crespo Lopez-Urrutia J.R., Gebeshuber I.C., Lang M., Winter HP., Ullrich J., and Aumayr F. Nucl. Instr. and Meth. B 256 (2007) 346
41. El-Said A.S., Meissl W., Simon M.C., Crespo Lopez-Urrutia J.R., Lemell C., Burgdörfer J., Gebeshuber I.C., Winter HP., Ullrich J., Trautmann C., Toulemonde M., and Aumayr F. Nucl. Instr. and Meth. B 258 (2007) 167
42. Lemell C., El-Said A.S., Meissl W., Gebeshuber I.C., Trautmann C., Toulemonde M., Burgdörfer J., and Aumayr F. Solid State Electron. 51 (2007) 1398
43. El-Said A.S., Meissl W., Simon M.C., Crespo Lopez-Urrutia J.R., Gebeshuber I.C., Laimer J., Winter HP., Ullrich J., and Aumayr F. Radiat. Eff. Defect Solid 162 (2007) 467
44. Tona M., Watanabe H., Takahashi S., Nakamura N., Yoshiyasu N., Sakurai M., Terui T., Mashiko S., Yamada C., and Ohtani S. Surf. Sci. 601 (2007) 723
45. Tona M., Watanabe H., Takahashi S., Nakamura N., Yoshiyasu N., Sakurai M., Terui T., Mashiko S., Yamada C., and Ohtani S. Nucl. Instr. and Meth. B 256 (2007) 543
46. Tona M., Watanabe H., Takahashi S., Nakamura N., Yoshiyasu N., Sakurai M., Yamada C., and Ohtani S. Nucl. Instr. and Meth. B 258 (2007) 163
47. Tona M., Watanabe H., Takahashi S., Fujita Y., Abe T., Jian S., Nakamura N., Yoshiyasu N., Yamada C., Sakurai M., and Ohtani S. J. Phys. Conf. Ser. 58 (2007) 331
48. Pomeroy J.M., Grube H., Perrella A.C., and Gillaspy J. Nucl. Instr. and Meth. B 258 (2007) 189
49. Pomeroy J.M., Perrella A.C., Grube H., and Gillaspy J. Phys. Rev. B 75 (2007) 241409R
50. Gebeshuber I.C., Cernusca S., Aumayr F., and Winter HP. Nucl. Instr. and Meth. B 205 (2003) 751
51. Gillaspy J.D., Parks D.C., and Ratliff L.P. J. Vac. Sci. Technol. B 16 (1998) 3294
52. Arnoldbik W.M., Tomozeiu N., and Habraken F.H.P.M. Nucl. Instr. and Meth. B 203 (2003) 151
53. Toulemonde M., Assmann W., Dufour C., Meftah A., Studer F., and Trautmann C. Mat. Fys. Med. Dan. Vid. Selsk. 52 (2007) 263
54. Toulemonde M., Dufour C., Meftah A., and Paumier E. Nucl. Instr. and Meth. B 166/167 (2000) 903
55. Aumayr F., and Winter H.P. e-J. Surf. Sci. Nanotech. 1 (2003) 171
56. Pomeroy J.M., Grube H., Perrella A.C., and Gillaspy J. Appl. Phys. Lett. 91 (2007) 073506