Electronic sputtering of thin SiO2 films by MeV heavy ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 203, Issue , 2003, Pages 151-157

  Arnoldbik, W M ^a   Tomozeiu, N ^a   Habraken, F H P M ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

Elastic recoil detection analysis; Electronic sputtering; Potential sputtering; Silicon dioxide thin films

Indexed keywords

ENERGY DISSIPATION; HEAVY IONS; IONIZATION; SILICA; SPUTTERING;

ELECTRONIC SPUTTERING;

THIN FILMS;

EID: 0037389166     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)02203-6     Document Type: Conference Paper

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