Potential sputtering from a Si surface by very highly charged ion impact

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 258, Issue 1, 2007, Pages 163-166

  Tona, Masahide ^a,b   Watanabe, Hirofumi ^a,b   Takahashi, Satoshi ^a   Nakamura, Nobuyuki ^a   Yoshiyasu, Nobuo ^a   Sakurai, Makoto ^c   Yamada, Chikashi ^a   Ohtani, Shunsuke ^a,b  

^a UNIVERSITY OF ELECTRO COMMUNICATIONS   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c KOBE UNIVERSITY   (Japan)

Author keywords

Highly charged ion (HCI); Potential sputtering; Scanning tunneling microscopy (STM); Si surface; Time of flight secondary ion mass spectrometry (TOF SIMS)

Indexed keywords

ION BOMBARDMENT; RADIATION EFFECTS; SCANNING TUNNELING MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SILICA; SPUTTERING; THIN FILMS;

CLUSTER FRAGMENTS; ION EMISSION; POTENTIAL SPUTTERING;

POSITIVE IONS;

EID: 34147092620     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.12.177     Document Type: Article

References (17)

1. Aumayr F., and Winter W.P. Phil. Trans. R. Soc. Land. A 362 (2004) 77
2. Arnau A., Aumayr F., Echenique P.M., Grether M., Heiland W., Limburg J., Morgenstern R., Roncin P., Schippers S., Schuch R., Stolterfoht N., Varga P., Zouros T.M.J., and Winter H.P. Surf. Sci. Rep. 27 (1997) 113
3. Schenkel T., Hamza A.V., Barnes A.V., and Schneider D.H. Prog. Surf. Sci. 61 (1999) 23
4. Gillaspy J.D. J. Phys. B: At. Mol. Opt. Phys. 34 (2001) R93
5. Watanabe H., Asada J., Currell F., Fukami T., Hirayama T., Motohashi K., Nakamura N., Nojikawa E., Ohtani S., Okazaki K., Sakurai M., Shimizu H., Tada N., and Tsurubuchi S. J. Phys. Soc. Jpn. 66 (1997) 3795
6. Shimizu H., Currell F.J., Ohtani S., Sokell E.J., Yamada C., Hirayama T., and Sakurai M. Rev. Sci. Instr. 71 (2000) 681
7. Tona M., and Takahashi S. J. Phys. Conf. Ser. 2 (2004) 57
8. Tona M., Nagata K., Takahashi S., Nakamura N., Yoshiyasu N., Sakurai M., Yamada C., and Ohtani S. Surf. Sci. 600 (2006) 124
9. Takahashi S., Tona M., Nagata K., Nakamura N., Yoshiyasu N., Yamada C., Ohtani S., and Sakurai M. Appl. Phys. Lett. 87 (2005) 063111
10. Burgdörfer J., Lerner P., and Meyer F.W. Phys. Rev. A 44 (1991) 5674
11. Bitenskii I.S., Murakhmetov M.N., and Parilis E.S. Sov. Phys. Tech. Phys. 24 (1979) 618
12. Parilis S., Kishinevsky L.M., Turaev N.Yu., Baklitzky B.E., Umarov F.F., Verleger V.Kh., Nizhnaya S.L., and Bitensky I.S. Atomic Collisions on Solid Surfaces (1993), Elsevier Science, Amsterdam (Chapter 12)
13. Tona M., Takahashi S., Nagata K., Yoshiyasu N., Yamada C., Nakamura N., Ohtani S., and Sakurai M. Appl. Phys. Lett. 87 (2005) 224102
14. Yoshiyasu N., Takahashi S., Shibata M., Shimizu H., Nagata K., Nakamura N., Tona M., Sakurai M., Yamada C., and Ohtani S. Jpn. J. Appl. Phys. 45 (2006) 995
15. Takayanagi K., Tanishiro Y., Takahashi S., and Takahashi M. Surf. Sci. 164 (1985) 367
16. Tona M., Watanabe H., Takahashi S., Nakamura N., Yoshiyasu N., Sakurai M., Terui T., Mashiko S., Yamada C., and Ohtani S. Surf. Sci. 601 (2007) 723
17. M. Tona et al., J. Phys. Conf. Ser., submitted for publication.